Acta Optica Sinica, Volume. 31, Issue 8, 812005(2011)
Phase Subdivision of Absolute Coding Grating and Application in Displacement Measurement
[1] [1] Jin Guofan, Li Jingzhen. Laser metrology [M]. Beijing: Science Press, 1998
[2] [2] He Shurong, Xiao Zongyang. Study of displacement sensor using CCD to subdivide grating directly [J]. Optical Technique, 1999, (3): 1~3,7
[3] [3] Yang Junping, Wu Xinhui, Qin Changhai. The design of displacement measurement system based on CMOS image sensors in grating sensors [J]. Science & Technology Information, 2010, (5): 490~491
[4] [4] Zheng Hong. Research on single track beeline encoder with CCD fractionize [J]. China Mechanical Engineering, 2003, 14(3): 195~197
[5] [5] Mitsuo Takeda, Hideki Ina, Seiji Kobayashi. Fourier-transform method of fringe-pattern analysis for computer-based topography and interferometry [J]. J. Opt. Soc. Am, 1982, 72(1): 156~160
[6] [6] Luo Gang, Fang Hui, Fang Zhiliang et al.. Measurement of fringe shift using phase information [J]. Opt. Technol., 2000, 26(2): 130~133
[10] [10] Zhao Yong, Su Xianyu, Li Wen. Phase subdivision of absolute coding grating [J]. J. Optoelectronics·Laser, 2010, 21(1): 91~95
[11] [11] Yan Wei, Hu Song, Tang Xiaoping et al.. The method and equipment of maskless step digital lithography based on DMD [J]. Equipment for Electronic Products Manufacturing, 2008, (10): 14~19
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Zhao Yong, Su Xianyu, Zhang Qican. Phase Subdivision of Absolute Coding Grating and Application in Displacement Measurement[J]. Acta Optica Sinica, 2011, 31(8): 812005
Category: Instrumentation, Measurement and Metrology
Received: Mar. 25, 2011
Accepted: --
Published Online: Jul. 19, 2011
The Author Email: Yong Zhao (zy999@vip.sina.com)