Chinese Journal of Lasers, Volume. 51, Issue 4, 0402408(2024)
Study on Ultrafast Laser Processing Technology of Porous Glass Microcone Array(Invited)
Fig. 1. In-situ observation platform for picosecond laser processing. (a) Schematic; (b) actual platform
Fig. 2. Morphologies of porous glass. (a) Appearance; (b) morphology by CT scanning; (c) SEM morphology
Fig. 3. Morphologies of K9 glass and porous glass under different N with laser removal range shown by dashed line and spot irradiation range shown by solid line. (a)‒(d) K9 glass; (e)‒(h) porous glass
Fig. 4. Comparison of groove processing between porous glass and K9 glass. (a) Schematic of single scanning route; (b) morphology of porous glass after two times of ablation; (c) morphology of K9 glass after 50 times of ablation; (d) removal volume by single pulse and surface roughness after processing
Fig. 5. Ultrafast laser processing of porous glass and K9 glass under different moments. (a)(d) 0 ms; (b)(e) 2 ms; (c)(f)
Fig. 6. Removal mechanisms of porous glass and dense glass by ultrafast laser. (a) Laser-induced particle spalling; (b) laser ablation
Fig. 7. Schematics of microcone array machining. (a) Geometric features of microcone array; (b) scanning strategy with constant feeding direction; (c) scanning strategy with feeding from edge of microcone to center
Fig. 8. Microcone array machined under constant feeding direction. (a) Local 3D morphology of microcone array when Dth=100 μm; (b) statistics of cone apex size and cone height error under different machining allowances
Fig. 9. Microcone array machined under scanning strategy with feeding from edge of microcone to center. (a) Local 3D morphology of microcone array when Dth=100 μm; (b) statistics of cone apex size and cone height error under different machining allowances
Fig. 11. Fabrication, assemblage and test of emitter. (a) Geometric structure of emitter; (b) physical image of machined emitter and 3D morphology of typical microcone; (c) appearance of electrospray thruster and its working situation
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Zijie Lu, Guohu Luo, Daisun Wang, Kai Zhang, Kangwu Zhu, Yongxiang Hu. Study on Ultrafast Laser Processing Technology of Porous Glass Microcone Array(Invited)[J]. Chinese Journal of Lasers, 2024, 51(4): 0402408
Category: Laser Micro-Nano Manufacturing
Received: May. 8, 2023
Accepted: Jul. 4, 2023
Published Online: Jan. 16, 2024
The Author Email: Hu Yongxiang (huyx@sjtu.edu.cn)
CSTR:32183.14.CJL230805