Chinese Journal of Lasers, Volume. 51, Issue 4, 0402408(2024)

Study on Ultrafast Laser Processing Technology of Porous Glass Microcone Array(Invited)

Zijie Lu1, Guohu Luo1, Daisun Wang1, Kai Zhang2, Kangwu Zhu2, and Yongxiang Hu1、*
Author Affiliations
  • 1School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai 200240, China
  • 2Shanghai Aerospace Control Technology Institute, Shanghai 201109, China
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    Figures & Tables(11)
    In-situ observation platform for picosecond laser processing. (a) Schematic; (b) actual platform
    Morphologies of porous glass. (a) Appearance; (b) morphology by CT scanning; (c) SEM morphology
    Morphologies of K9 glass and porous glass under different N with laser removal range shown by dashed line and spot irradiation range shown by solid line. (a)‒(d) K9 glass; (e)‒(h) porous glass
    Comparison of groove processing between porous glass and K9 glass. (a) Schematic of single scanning route; (b) morphology of porous glass after two times of ablation; (c) morphology of K9 glass after 50 times of ablation; (d) removal volume by single pulse and surface roughness after processing
    Ultrafast laser processing of porous glass and K9 glass under different moments. (a)(d) 0 ms; (b)(e) 2 ms; (c)(f)4 ms
    Removal mechanisms of porous glass and dense glass by ultrafast laser. (a) Laser-induced particle spalling; (b) laser ablation
    Schematics of microcone array machining. (a) Geometric features of microcone array; (b) scanning strategy with constant feeding direction; (c) scanning strategy with feeding from edge of microcone to center
    Microcone array machined under constant feeding direction. (a) Local 3D morphology of microcone array when Dth=100 μm; (b) statistics of cone apex size and cone height error under different machining allowances
    Microcone array machined under scanning strategy with feeding from edge of microcone to center. (a) Local 3D morphology of microcone array when Dth=100 μm; (b) statistics of cone apex size and cone height error under different machining allowances
    SEM images of top morphology of microcone
    Fabrication, assemblage and test of emitter. (a) Geometric structure of emitter; (b) physical image of machined emitter and 3D morphology of typical microcone; (c) appearance of electrospray thruster and its working situation
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    Zijie Lu, Guohu Luo, Daisun Wang, Kai Zhang, Kangwu Zhu, Yongxiang Hu. Study on Ultrafast Laser Processing Technology of Porous Glass Microcone Array(Invited)[J]. Chinese Journal of Lasers, 2024, 51(4): 0402408

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    Paper Information

    Category: Laser Micro-Nano Manufacturing

    Received: May. 8, 2023

    Accepted: Jul. 4, 2023

    Published Online: Jan. 16, 2024

    The Author Email: Hu Yongxiang (huyx@sjtu.edu.cn)

    DOI:10.3788/CJL230805

    CSTR:32183.14.CJL230805

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