Chinese Journal of Lasers, Volume. 45, Issue 11, 1104005(2018)
Spacing Calibration of Adaptive Null Compensator in Free Form Surface Interferometer
Fig. 1. Principle of AFI. (a) System layout; (b) polarization design of optical path in ANC
Fig. 2. Spacing calibration method of ANC. (a) Positive wave-front propagation; (b) calibration system; (c) calibration method
Fig. 3. Simulation experiment. (a) Modelling; (b) RMS of final measurement results based on modelling of dDP errors
Fig. 4. Simulation results of spacing calibration of ANC under different situations. (a) Shift distance; (b) measurement number; (c) null fringe pattern in each shift; (d) null fringe number
Fig. 7. Spacing calibration in two groups of experiments. (a)-(c) First group of experiments; (d)-(f) second group of experiments
Fig. 8. Test results of surface figure errors of two paraboloid mirrors after spacing calibration of ANC. (a)-(c) Three independent test results for first paraboloid mirror; (d) test result of first paraboloid mirror by Zygo interferometer; (e)-(g) three independent test results for second paraboloid mirror; (h) test result of second paraboloid mirror by Zygo interferometer
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Lei Zhang, Dong Li, Sheng Zhou, Jingsong Li, Benli Yu. Spacing Calibration of Adaptive Null Compensator in Free Form Surface Interferometer[J]. Chinese Journal of Lasers, 2018, 45(11): 1104005
Category: measurement and metrology
Received: Jun. 5, 2018
Accepted: Jul. 24, 2018
Published Online: May. 9, 2019
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