Chinese Journal of Lasers, Volume. 45, Issue 11, 1104005(2018)

Spacing Calibration of Adaptive Null Compensator in Free Form Surface Interferometer

Lei Zhang1、*, Dong Li2, Sheng Zhou1, Jingsong Li1, and Benli Yu1
Author Affiliations
  • 1 Key Laboratory of Opto-Electronic Information Acquisition and Manipulation, Ministry of Education,Anhui University, Hefei, Anhui 230601, China
  • 2 Research Center of Laser Fusion, Chinese Academy of Engineering Physics, Mianyang, Sichuan 621900, China
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    Figures & Tables(11)
    Principle of AFI. (a) System layout; (b) polarization design of optical path in ANC
    Spacing calibration method of ANC. (a) Positive wave-front propagation; (b) calibration system; (c) calibration method
    Simulation experiment. (a) Modelling; (b) RMS of final measurement results based on modelling of dDP errors
    Simulation results of spacing calibration of ANC under different situations. (a) Shift distance; (b) measurement number; (c) null fringe pattern in each shift; (d) null fringe number
    Experimental layout
    Null fringes obtained by experimental calibration
    Spacing calibration in two groups of experiments. (a)-(c) First group of experiments; (d)-(f) second group of experiments
    Test results of surface figure errors of two paraboloid mirrors after spacing calibration of ANC. (a)-(c) Three independent test results for first paraboloid mirror; (d) test result of first paraboloid mirror by Zygo interferometer; (e)-(g) three independent test results for second paraboloid mirror; (h) test result of second paraboloid mirror by Zygo interferometer
    • Table 1. Parameters of DM

      View table

      Table 1. Parameters of DM

      ParametersValue
      ModelAlpaoTM DM88
      ModeMembrane
      Aperture /mm20
      Actuators88
    • Table 2. Parameters of PNO

      View table

      Table 2. Parameters of PNO

      ParametersValue
      MaterialBK-7
      Radius /mm88.23, 396.30
      Aperture /mm40
      Thickness /mm8
    • Table 3. PV and RMS values of test results for paraboloid mirrors in Fig. 7

      View table

      Table 3. PV and RMS values of test results for paraboloid mirrors in Fig. 7

      MethodFirst paraboloidmirrorSecond paraboloidmirror
      PV /λRMS /λPV /λRMS /λ
      0.2010.0160.1120.014
      AFI0.2000.0160.1050.014
      0.1970.0160.1070.014
      Zygo0.1990.0160.1090.014
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    Lei Zhang, Dong Li, Sheng Zhou, Jingsong Li, Benli Yu. Spacing Calibration of Adaptive Null Compensator in Free Form Surface Interferometer[J]. Chinese Journal of Lasers, 2018, 45(11): 1104005

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    Paper Information

    Category: measurement and metrology

    Received: Jun. 5, 2018

    Accepted: Jul. 24, 2018

    Published Online: May. 9, 2019

    The Author Email:

    DOI:10.3788/CJL201845.1104005

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