Piezoelectrics & Acoustooptics, Volume. 46, Issue 3, 386(2024)
Optimization of High-Temperature-Resistant Lead Structure for MEMS High-Temperature Pressure Sensors
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LIU Runpeng, LEI Cheng, LIANG Ting, DU Kangle. Optimization of High-Temperature-Resistant Lead Structure for MEMS High-Temperature Pressure Sensors[J]. Piezoelectrics & Acoustooptics, 2024, 46(3): 386
Paper Information
Received: Feb. 23, 2024
Accepted: --
Published Online: Aug. 29, 2024
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