Fig. 1. Normalized IBIL energy spectrum at different fluences at 100 and 200 K

Fig. 2. Schematic diagram of Gauss and Voigt functions for IBIL energy spectrum of (a) 100 K and (b) 200 K with fluence of 6.22×10¹¹ ions·cm^-2 peak splitting
The green and the red line are the results obtained by using Gauss and Voigt functions to separate peaks, respectively

Fig. 3. The peak position using Gauss and Voigt functions to split the IBIL spectra at (a) 100 K and (b) 200 K evolves with fluence

Fig. 4. The Lorentz peak FWHM (w_L) and Gaussian peak FWHM (w_G) of three sub-peaks obtained by the Voigt function splitting the IBIL energy spectrum evolve with fluence
The FWHM of the Gaussian peak evolves with the fluence at (a) 100 K and (b) 200 K; The FWHM of Lorentz Peak evolves with the fluence at (c) 100 K and (d) 200 K