Fig. 1. Nonlinear absorption diagram

Fig. 2. New-type LDW lithography system

Fig. 3. Effective laser action area of the focused spot on the material will change correspondingly according to the threshold of the material

Fig. 4. Super-resolution fabrication by using new-type LDW. (a) Laser drilled nanoholes arrays^[28]; (b) nanograting^[64]; (c) nanogap electrode arrays^[22]

Fig. 5. Multi-acceptor materials fabrication by using new-type LDW^[28]. (a) Cross-like structures; (b) integrated circuit; (c) electrode

Fig. 6.

Grayscale masks based on metal oxidation by new-type LDW^[12]. (a)(b)(g)(h)(k) Scanning electron microscope (SEM) images of various MTMO grayscale masks fabricated; (c)(d) solid structures produced by (a) mask and (b) mask; (e)(f) solid grating by MTMO grayscale mask and its imaging effect; (i)(j) microlens array fabricated by using (h) mask and imaging photo; (l)(m) single Fresnel lens based on mask and imaging of letter A; (n)(o) glass convex-lens array fabricated by MTMO grayscale mask and imaging of letter A using the lens array

Fig. 7. Optical images in Sn film created by the LDW technique^[60]. (a) Logo of Chinese Academy of Sciences; (b) logo of Beijing Olympic games; (c) front-lit image of a wolf; (d) back-lit image of a wolf

Fig. 8.

Mechanism and morphology of localized laser heating for self-organization of monolayered metallic nanoparticles and performance of the refined Ag nanofilm as SERS chip^[61]. (a) Schematic graph of self-organization and morphology evolution based on classical spinodal theory (up) and anomalously refined theory (down); (b) Ag thin film; (c) SEM image of irradiated Ag film using a focused laser beam with spot diameter of 3 mm; (d) SEM image of irradiated Ag film using a focused laser beam with spot diameter of 300 nm; (e) Raman spectra of R6g with different concentrations on the SERS chip with D=10.9 nm; (f) Raman spectra of R6g (10^-9 M) collected from 121 points in a 11×11 pixel array; (g) optical image of patterned film in SERS (up) and Raman mapping of R6g (10^-9 M) at the Raman peak of 1651 cm^-1 (down)

Fig. 9.

One-step fabrication of micro/nanotunnels in metal interlayers^[27]. (a) Sandwich structure composed amorphous ZnS‒SiO₂ in underlayer and covering layer and polycrystalline Sn in interlayer (inset: lattice structure of Sn grain); (b) SEM image of a row of nanocavities in a disk track cross section (inset: high magnification image of a typical nanocavity); (c)‒(e) typical microfluidic devices; (f) SEM image of the nanotunnels constituting the letters of NANO written (inset: cross-section view of the nanotunnel with the dimensions of 170 nm wide and 50 nm high)

Fig. 10. Patterning order strain structures in 2D materials^[62]. (a) Few-layer MoS₂; (b) graphene monolayer

Fig. 11. Laser doping modulates the electrical properties and energy band distribution of MoTe₂^[63]. (a) Schematic diagram of MoTe₂ irradiated by a laser; (b) transfer curves of MoTe₂ acted by different laser powers (inset: optical image of the device in the experiment); (c)(g) optical photographs andcurrent-voltage(I-V) characteristics of uniform power laser-doped MoTe₂ (inset: corresponding band structure); (d)(h) optical photographs and I-V characteristics of MoTe₂ doped using the power gradient laser (inset: corresponding band structure); (e)(i) optical photographs and I-V characteristics of MoTe₂ doped with a rectangular symmetric pattern laser in the center of the channel (inset: corresponding band structure); (f)(j) optical photographs and I-V characteristics of MoTe₂ doped with a triangular pattern (area gradient) laser in the center of the channel (inset: corresponding band structure)

Fig. 12. Super-resolution GaAs nanograting fabricated by the New-type LDW^[64]

Fig. 13.

Path-directed and maskless fabrication of ordered TiO₂ nanoribbons^[28]. (a) Linear dependence diameter of laser drilled holes change with laser power; (b) SEM image of diameter of laser drilled holes change with laser power(inset: amplification of 40 nm-diameter drilled hole under a laser power of 10.5 mW); (c) SEM image of curling nanoribbons after etching in HF for about 5 min; (d)‒(j) SEM images of various complex-shaped structures made up of nanoribbons [(d) square array; (e) circular array; (f) micro networks; (g) cross-like structures with a gradually changed width; (h) letters of NANO; (i) ribbon array with a gradually changed width; (j) nanogaps with super-resolution dimension]

Fig. 14. Sub-5 nm gap electrode and array fabricated by super-resolution LDW^[22]. (a) Illustration of the simplified fabrication procedure of the nanogaps by the two laser beams overlapping technique; (b) simulation result of heating distribution by laser irradiation; (c) nanogap fabricated by LDW; (d) clock fabricated by LDW; (e) nanogap electrode array

Fig. 15. Path-guided wrinkling of nanoscale metal films^[72]. (a) Schematic illustration of LDW for making guiding path in an Au/PS bilayer; (b)‒(j) AFM images of various surface microstructures [(b) parallel line wrinkles; (c) tilt and side views of the wrinkles in Fig. (b); (d) concentric circular wrinkles; (e) hexagonal arrays of wrinkle-dots; (f) tetragonal arrays of wrinkle-dots; (g) complex wrinkle pattern composed of dots and lines; (h) orthogonally aligned lines and dots; (i) egg-crate structure; (j) section analysis of the wrinkles in Fig. (i)]

Fig. 16. Study on laser-induced wrinkling unit^[77]. (a) Schematic for generation of isolated quasi-3D plastic dot-deformations; (b) AFM image of experimental dot deformations; (c) experimental dot deformation section curve fitted by a damping function; (d) schematic for the imaging test of a convex-concave lens array; (e)(f) real and virtual images of the letter A by using the convex-concave lens array, respectively; (g) calculated (up) and experimental (down) topographies of microlens arrays with different line distance

Fig. 17. Kaleidoscopic images formed by a relief mask with a convex concave microlens array (scale bars are 20 mm)^[77]. (a)‒(i) Optical microscope-captured images by using a transparent convex-concave microlens array with different imaging positions; (j) schematic diagram of proximity-mode ultraviolet photography, with the convex-concave microlens array as a relief mask; (k) transferring patterns in Fig. (b), (d), and (g) on photoresist

Fig. 18.

In situ direct laser writing fabrication of patterned γ-CsPbI3 PQDs^[82]. (a) Schematic illustration of the process direct laser writing; (b) SEM images of optical grating; (c) optical grating under UV-365 nm light; (d) Chinese knot under fluorescence microscope; (e) Chinese knot under UV-365 nm light; (f) letters of BIT under fluorescence microscope; (g) letters of BITunder UV-365 nm light

Fig. 19. Novel super-resolution nanostructures fabricated by the New-Ge LDW. (a)‒(f) Laser drilling sub-10 nm caves on an island-shaped indium^[83] [(a) schematic diagram of laser drilling nanocaves; (b) SEM image of as-deposited island shaped indium film; (c) SEM image of nanocave array after laser fabrication, inset is an enlarged image of nanoholes; (d) AFM image of a random nanocave; (e) cross-section profile of Fig. (d); (f) diameter distribution of the nanocaves]; (g)‒(k) internal-nanocavity-based structural colors fabricated by laser printing^[24] [(g) schematic diagram of laser printing; (h) high-resolution bright dot array; (i) optical images of the structural colors; (j) laser printed colorful butterfly pattern; (k) SEM cross-section characterization of the laser printing nanocavity]; (l)‒(p) carbon nanotube bridges fabricated by laser comb^[84] [(l) fabrication process of carbon nanotube bridges; (m) SEM image of the as-prepared CNT network covered the trench before laser irradiation; (n) SEM image of aligned suspended CNTs with the trench rotated by 45°; (o)(p) SEM image of aligned suspended CNTs and its zoom-in image]