White Light Interferometry Stitching Measurement of Gull-Wing Aspheric Optics

Wenwen Lu; Jingyang Guo; Shanyong Chen

doi:10.3788/AOS202242.0912001

Acta Optica Sinica, Volume. 42, Issue 9, 0912001(2022)

White Light Interferometry Stitching Measurement of Gull-Wing Aspheric Optics

Wenwen Lu^1,2, Jingyang Guo^1,2, and Shanyong Chen^1,2、*

¹Laboratory of Science and Technology on Integrated Logistics Support, College of Intelligence Science and Technology, National University of Defense Technology, Changsha 410073, Hunan, China

²Hunan Key Laboratory of Ultra-Precision Machining Technology, Changsha 410073, Hunan, China

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Figures & Tables(15)

Fig. 1. Gull-wing aspheric optics. (a) Sample piece; (b) gull-wing surface divided into central convex and outer concave at inflection point

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Fig. 2. Subaperture division based on transformation between global coordinate system and local coordinate system

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Fig. 3. Subaperture division for gull-wing surface

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Fig. 4. Scanning measurement path planning. (a) Central ring subaperture; (b) first ring off-axis position subaperture; (c) overlapping region of central ring subaperture and first ring off-axis position subaperture; (d) measurement path planning of central ring and first ring; (e) measurement path planning of full aperture

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Fig. 5. Three-dimensional model diagram of scanning measurement platform

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Fig. 6. Flow chart of scanning stitching measurement

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Fig. 7. Calculation diagram of overlapping point pair matching

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Fig. 8. Gull-wing aspheric surface measurement site

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Fig. 9. Partial subaperture measurement results. (a1)(a2) Central subaperture; (b1)(b2) first ring off-axis position subaperture; (c1)(c2) second ring off-axis position subaperture; (d1)(d2) third ring off-axis position subaperture

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Fig. 10. Full aperture profile error result

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Fig. 11. Comparison of line profile measurement results. (a) profile result of full-aperture profile error line; (b) measurement result obtained by profiler

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Fig. 12. CGH compensator test comparison experiment. (a) CGH compensator test site; (b) CGH profile test result; (c) profile test comparison in same area

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Table 1. Parameters of surface shape
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Table 1. Parameters of surface shape
Parameter R /mm K α₁ α₂ α₃ α₄
Value 16.02 0 0 -3.7045134×10^-4 -9.7543842×10^-7 -8.70055945×10^-8

Table 2. Specifications of standard objective lens with 1024 pixel×1024 pixel detector array
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Table 2. Specifications of standard objective lens with 1024 pixel×1024 pixel detector array
Parameter 2.75× 5.50× 10.00× 20.00× 50.00×
Type Michelson Michelson Mirau Mirau Mirau
NA 0.08 0.15 0.30 0.40 0.55
FOV /(mm²) 3.00 1.50 0.83 0.42 0.17
Slope limit /(°) 3.71 7.27 14.53 21.80 28.13
R/D 7.73 3.95 1.99 1.35 1.06

Table 3. Design parameters of subaperture for gull-wing surface
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Table 3. Design parameters of subaperture for gull-wing surface
Parameter Centralring Firstring Secondring Thirdring
β /(°) 0 4.5 8.0 8.0
γ /(°) 0 36 20 12
x₀ /mm 0 1.3102 2.7099 4.1450
z₀ /mm 0 -0.0526 -0.2103 -0.4236

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Wenwen Lu, Jingyang Guo, Shanyong Chen. White Light Interferometry Stitching Measurement of Gull-Wing Aspheric Optics[J]. Acta Optica Sinica, 2022, 42(9): 0912001

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