Acta Optica Sinica, Volume. 43, Issue 9, 0912001(2023)
Sharpness Evaluation Function for Line Patterns in Focal Length Measurement
Fig. 5. Out of focus-positive focus-out of focus Porror reticle line pattern images. (a) 0° line pattern; (b) 45° line pattern; (c) 90° line pattern
Fig. 6. Normalized evaluation function curves (top left is partial magnification near peak). (a) 0° line pattern; (b) 30° line pattern; (c) 45° line pattern; (d) 60° line pattern; (e) 90° line pattern
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Jihao Liu, Rongsheng Lu, Zilong Zhang, Ailin Zhang. Sharpness Evaluation Function for Line Patterns in Focal Length Measurement[J]. Acta Optica Sinica, 2023, 43(9): 0912001
Category: Instrumentation, Measurement and Metrology
Received: Oct. 12, 2022
Accepted: Dec. 5, 2022
Published Online: May. 9, 2023
The Author Email: Lu Rongsheng (rslu@hfut.edu.cn)