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Acta Optica Sinica, Volume. 45, Issue 1, 0114002(2025)

Controllable Fabrication of Sub-Wavelength Nanostructures on 4H-SiC Surface Using Delayed Triple Femtosecond

Wanlin He1、* and Yanjun Qin2
Author Affiliations
  • 1School of Science, Xi’an Shiyou University, Xi’an 710065, Shaanxi , China
  • 2School of Science, Xinjiang Institute of Technology, Aksu 843100, Xinjiang , China
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    Schematic diagram of experimental setup

    Fig. 1. Schematic diagram of experimental setup

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    SEM images of ripple structures on 4H-SiC surface induced by single femtosecond laser pulse

    Fig. 2. SEM images of ripple structures on 4H-SiC surface induced by single femtosecond laser pulse

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    SEM images of quasi-periodic ripple structures on 4H-SiC surface induced by two femtosecond laser pulses under condition of different time-delay and at same polarization directions. (a) Δt=0 ps; (b) Δt=45 ps; (c) Δt=90 ps; (d) Δt=120 ps

    Fig. 3. SEM images of quasi-periodic ripple structures on 4H-SiC surface induced by two femtosecond laser pulses under condition of different time-delay and at same polarization directions. (a) Δt=0 ps; (b) Δt=45 ps; (c) Δt=90 ps; (d) Δt=120 ps

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    SEM images of ripple structures on 4H-SiC surface induced using three temporally delayed femtosecond laser pulses

    Fig. 4. SEM images of ripple structures on 4H-SiC surface induced using three temporally delayed femtosecond laser pulses

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    SEM images of two-dimensional structures on 4H-SiC surface induced using three temporally delayed femtosecond laser pulses. (a) Ablative spots at different defocus distances; (b) two-dimensional nano-square structure; (c) two-dimensional nano-rhomb structure

    Fig. 5. SEM images of two-dimensional structures on 4H-SiC surface induced using three temporally delayed femtosecond laser pulses. (a) Ablative spots at different defocus distances; (b) two-dimensional nano-square structure; (c) two-dimensional nano-rhomb structure

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    Wanlin He, Yanjun Qin. Controllable Fabrication of Sub-Wavelength Nanostructures on 4H-SiC Surface Using Delayed Triple Femtosecond[J]. Acta Optica Sinica, 2025, 45(1): 0114002

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Aug. 15, 2024

    Accepted: Sep. 27, 2024

    Published Online: Jan. 20, 2025

    The Author Email: He Wanlin (wlhe@xsyu.edu.cn)

    DOI:10.3788/AOS241431

    CSTR:32393.14.AOS241431

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology