Research on Fabrication and Optical Performance Testing of Silicon Microlenses Array with Large F/ Number

[in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]; [in Chinese]

Chinese Journal of Lasers, Volume. 27, Issue 12, 1097(2000)

[in Chinese]¹, [in Chinese]¹, [in Chinese]¹, [in Chinese]¹, and [in Chinese]²

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¹[in Chinese]

²[in Chinese]

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References(5)

[1] [1] Z.D.Popovic,R.A.Sprague,G.A.N.Connell.Technique for monolithic fabrication of microlens arrays. Appl. Opt., 1988,27(27):1281～1284

[3] [3] S.Haselbeck,H.Schreiber,J.Schwider et al..Microlenses fabricated by melting a photoresist on a base layer.Opt.Eng.,1993,32(6):1322～1324

[4] [4] T.R.Jay,M.B.Stern.Preshaping photoresist for refractive microlens fabrication.Opt.Eng.,1994,33(11): 3552～3555

[5] [5] Lars Erdmann,Dirk Efferenn.Technique for monolithic fabrication of silicon microlenses with selectable rim angles.Opt.Eng.,1997,36(4):1094～1098

[7] [7] Zhang Xinyu,Yi Xinjian,He Miao et al..128×128 element silicon microlens array fabricated by ion beam etching for PtSi IRCCD.SPIE,1998,3551:191～198

CLP Journals

[1] Zhu Xianchang, Wu Fan, Cao Xuedong, Wu Shibin, Zhang Peng. Analysis of Focus Dislocation Induced by the Microlens Array Measuring Based on Grating Diffraction[J]. Acta Optica Sinica, 2011, 31(11): 1112010

[2] Zhong Kejun, Gao Yiqing, Li Feng, Zhang Zhimin. A Method of Fabricating Concave Polydimethylsiloxane Microlens Array[J]. Chinese Journal of Lasers, 2014, 41(3): 310002

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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Research on Fabrication and Optical Performance Testing of Silicon Microlenses Array with Large F/ Number[J]. Chinese Journal of Lasers, 2000, 27(12): 1097

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Paper Information

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Received: Apr. 19, 1999

Accepted: --

Published Online: Aug. 9, 2006

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Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology