Acta Optica Sinica, Volume. 30, Issue 9, 2753(2010)

Suppression of HigherOrder Harmonics by Different Filter in 5~40 nm

Zhou Hongjun1,2、*, Wang Guanjun1,2, Zheng Jinjin1,2, Hou Tonglin1,2, and Qiu Keqiang1,2
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  • 2[in Chinese]
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    References(13)

    [1] [1] M. Kuhne, P. Muller. Higher order contributions in the synchrotron radiation spectrum of a toroidal grating monochromator determined by the using of a transmission grating [J]. Rev. Sci. Instrum., 1989, 60(7): 2102~2104

    [2] [2] E. M. Gullikson, S. Mrowka, B. B. Kauffann, Recent developments in EUV reflectometry at the advanced light source [C]. SPIE, 2001, 4343: 91~102

    [3] [3] I. Waki, Y. Hiral, A. Momose et al.. Higherharmonics suppressor for soft X rays [J]. Rev. Sci. Instrum, 1989, 60(7): 2072~2075

    [4] [4] B. Kjornrattanawanich, R. Kored, C. N. Boyer et al.. Temperature dependence of the EUV responsivity of silicon photodiode detectors [J]. IEEE T. Electron. Dev., 2006, 53(2): 218~223

    [5] [5] R. Korder, C. Prince, D. Cunningham et al.. Present status of radiometric quality sillicon photodiades [J]. Matrologia, 2003, 40: 145~149

    [6] [6] L. R. Canfileld, R. E. Vest, R. Korder et al.. Absolute silicon photodiodes for 169 nm to 254 nm photons [J]. Metrologia. 1998, 35: 329~334

    CLP Journals

    [1] ZHOU Hong-jun, XIA Xuan-zhi, HUO Tong-lin, ZHENG Jin-jin. Distribution and suppression of higher-order harmonics of metrology beamline in 5~140 nm[J]. Optics and Precision Engineering, 2016, 24(7): 1550

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    Zhou Hongjun, Wang Guanjun, Zheng Jinjin, Hou Tonglin, Qiu Keqiang. Suppression of HigherOrder Harmonics by Different Filter in 5~40 nm[J]. Acta Optica Sinica, 2010, 30(9): 2753

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    Paper Information

    Category: Spectroscopy

    Received: Oct. 30, 2009

    Accepted: --

    Published Online: May. 15, 2014

    The Author Email: Zhou Hongjun (E-mail)

    DOI:10.3788/aos20103009.2753

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