Acta Optica Sinica, Volume. 9, Issue 1, 75(1989)

A Method for multiple angle of incidence ellipsometic analysis in determination of double-layer optical thin film parameters

ZHANG RUIZI, LUO JINSHEN, and CHEN MIQI
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    ZHANG RUIZI, LUO JINSHEN, CHEN MIQI. A Method for multiple angle of incidence ellipsometic analysis in determination of double-layer optical thin film parameters[J]. Acta Optica Sinica, 1989, 9(1): 75

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    Paper Information

    Category: Thin Films

    Received: Jan. 15, 1988

    Accepted: --

    Published Online: Sep. 20, 2011

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