Acta Optica Sinica, Volume. 9, Issue 1, 75(1989)
A Method for multiple angle of incidence ellipsometic analysis in determination of double-layer optical thin film parameters
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ZHANG RUIZI, LUO JINSHEN, CHEN MIQI. A Method for multiple angle of incidence ellipsometic analysis in determination of double-layer optical thin film parameters[J]. Acta Optica Sinica, 1989, 9(1): 75