[1] [1] FFLER J L, GORDIJN A, STOLK R L,et al.. Amorphous and ‘micromorph’ silicon tandemcells with high open-circuit voltage ［J］. Solar Energy Materials & Solar Cells, 2005, 87:251-259.

[2] [2] PALANI I A, VASA N J, SINGAPERUMAL M. Crystallization and ablation in annealing of amorphous-Si thin film on glass and crystalline-Si substrates irradiated by third harmonics of Nd3+:YAG laser ［J］. Materials Science in Semiconductor Processing, 2008, 11:107-116.

[3] [3] KIM C H, JUNG S H, JEON J H, et al.. A simple low-temperature laser-doping employing phosphosilicate glass and borosilicate glass films for the source and drain formation in poly-Si thin film transistors ［J］. Thin Solid Films, 2001, 397: 4-7.

[4] [4] PALANI I A, VASA N J, SINGAPERUMAL M, et al.. Investigation on production of highly textured Sb doped polycrystalline silicon using solid state Nd∶YAG laser for photovoltaic application［J］.SPIE, 2010, 7584:758410-8.

[5] [5] DOBRZANSKI LA, DRYGALAA A, GOLOMBEKA K, et al.. Laser surface treatment of multicrystalline silicon for enhancing optical properties［J］. Material Processing Technology, 2008, 201:291-296.

[6] [6] CHUNG H Y, CHEN C H, CHU H S. Analysis of surface texturization of solar cells by molecular dynamics simulations ［J］. Int. J. Photoenergy. 2008, Article id 540971 doi:10.1155/2008/540971.

[7] [7] PALANI I A, VASA N J, SINGAPERUMAL M, et al.. Investigation on laser-annealing and subsequent laser-nanotexturing of amorphous silicon (a-Si) films for photovoltaic application ［J］. JLMN-Journal of Laser Micro/Nanoengineering, 2010, 5:151-155.

[8] [8] PALANI I A, VASA N J, SINGAPERUMAL M, et al.. Annealing and texturing of a-Si film using Nd3+∶YAG laser with Gaussian and flat-top beam profiles［C］. IEEE Region 10 Annual International Conference, Proceedings/TENCON, 2010, 5686429: 1909-1914.

[9] [9] PALANI I A, VASA N J, SINGAPERUMAL M, et al.. Influence of laser wavelength and beam profile on Nd3+∶YAG laser assisted formation of polycrystalline-Si films ［J］. Thin Solid Films, 2010, 518:4183-4190.