[1] [1] Yu Yinshan, You Libing, Liang Xu, et al. Progress of excimer lasers technology[J]. Chinese J Lasers, 2010, 37(9): 2253-2270. (in Chinese)

[2] [2] Liu Shiyuan, Wu Xiaojian. Real-time exposure dose control algorithm for DUV excimer lasers[J]. Acta Optica Sinica, 2006, 26(6): 878-884.

[3] [3] Wakabayashi O, Enami T, Ishii K, et al. High-repetition-rate ArF excimer laser for microlithography[C]//SPIE, 2000, 4088: DOI10.1117/12. 405749.

[4] [4] Inoue S, Fujisawa T, Izuha K. Effective exposure dose measurement in optical microlithography[C]//SPIE, 2000, 3998: DOI10.1117/12. 386445.

[5] [5] Shi Haiyan, Zhao Jiangshan, Song Xingliang, et al. Analysis on factors affecting energy stability of excimer laser for lithography[J]. Infrared and Laser Engineering, 2014, 43(11): 3540-3546. (in Chinese)

[6] [6] Xie Chengke, Chen Ming, Yang Baoxi, et al. Development and performance testing of pulsed excimer laser energy detector[J]. Chinese J Lasers, 2015, 42(1): 0102006. (in Chinese)

[7] [7] Hu Juntao, Liu Xiang, Zhang Guoyong, et al. A real-time energy meter for medical excimer laser[J]. Chinese J Lasers, 2007, 34(12): 1732-1735. (in Chinese)

[8] [8] Liang Xu, You Libing, Wang Tao, et al. Excimer pulse energy stabilization realized by charging voltage realtime adjusting[J]. Chinese J Lasers, 2010, 37(2): 374-378.

[9] [9] Zhang Lei, Zhao Jun, Yang Pengling, et al. Pyroelectric detecting of high-repetition-frequency pulse laser[J]. Laser & Optoelectronics Progress, 2010, 47(7): 109-113. (in Chinese)

[10] [10] Liang Xu, You Libing, Yu Yinshan. Excimer laser pulse energy detection under pulse repetion running mode[J]. Chinese Journal of Quantum Electronics, 2010, 27(3): 281-287. (in Chinese)

[11] [11] Cen Zhaofeng, Li Xiaotong, Zhu Qihua. Stray light analysis for optical system[J]. Infrared and Laser Engineering, 2007, 36(3): 300-304. (in Chinese)

[12] [12] Zhang Haibo, Lou Qihong, Zhou Jun, et al. ArF excimer laser line narrowing technique[J]. Laser & Optoelectronics Progress, 2009, 46 (12): 46-51. (in Chinese)

[13] [13] Wang Qi, Wang Xiaoman, Zhao Haili, et al. Research on weak laser energy detection system[J]. Journal of Changchun University of Science and Technology (Natural Science Edition), 2016, 39(2): 62-66. (in Chinese)

[14] [14] Feng Gang, Feng Guobin, Shao Bibo, et al. Energy measurement of high-repetition-rate pulsed laser[J]. Chinese Optics, 2013, 6(2): 196-200. (in Chinese)

[16] [16] Xiong Yan, Lu Yaodong, Zhu Min, et al. Design of peak holding circruit for narrow laser pulse[J]. Laser & Infrared, 2012, 42(12): 1377-1380. (in Chinese)