Fig. 1. Scanning electron microscopy images of three types of resistance array structures^[4]. (a) Silicon bridge resistance; (b) thin film resistance; (c) suspended thin film resistance

Fig. 2. Circuit schematic diagram of basic unit of resistance array

Fig. 3. Working principle schematic of photothermal image conversion array

Fig. 4. Block diagram of infrared scene generation system using photothermal image conversion array

Fig. 5. Infrared images generated by photothermal image conversion array. (a) Input digital image; (b) 3-5 μm infrared image; (c) 8-12 μm infrared image

Fig. 6. Self-suspended thin film with microstructure developed by Beijing Institute of Technology^［32］

Fig. 7. Suspended thin film prepared on silicon substrates^[37]

Fig. 8. Silicon based suspension thin film^[38]

Fig. 9. Digital micro-mirror device (DMD)^［39］. (a) Photo of DMD; (b) scanning electron microscopy image of DMD pixels

Fig. 10. On/off state of DMD^［41］

Fig. 11. Schematic diagram of structure and working principle of LCoS^[56]

Fig. 12. Two period energy band of ICL under forward bias^［65］

Fig. 13. Infrared LED array^［66］. (a) Schematic diagram of infrared LED array; (b) microscope photo of infrared LED array; (c) microscope photo of single infrared LED