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Chinese Journal of Lasers, Volume. 40, Issue 2, 203009(2013)

Analysis of Radiation Forces Exerted on Defect Particle on the Wafer by a Laser Beam

Gong Lei1、*, Wu Zhensen2, Li Zhengjun2, Bai Lu2, and Gao Ming1
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  • 2[in Chinese]
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    Article index updated: Mar. 10, 2025

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    Gong Lei, Wu Zhensen, Li Zhengjun, Bai Lu, Gao Ming. Analysis of Radiation Forces Exerted on Defect Particle on the Wafer by a Laser Beam[J]. Chinese Journal of Lasers, 2013, 40(2): 203009

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    Paper Information

    Category: laser manufacturing

    Received: Oct. 8, 2012

    Accepted: --

    Published Online: Jan. 4, 2013

    The Author Email: Lei Gong (zzgonglei@126.com)

    DOI:10.3788/cjl201340.0203009

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology