Optics and Precision Engineering, Volume. 30, Issue 22, 2913(2022)

Multi-regularization image restoration method for X-ray images of integrated circuit

Ge MA, Sen LIN, Zhifu LI, Zhijia ZHAO, and Tao ZOU*
Author Affiliations
  • School of Mechanical and Electrical Engineering, Guangzhou University, Guangzhou510006, China
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    Figures & Tables(9)
    X-ray imaging schematic diagram and X-ray equipment used in this paper
    Standard grayscale images
    Restored results of capacitance element image
    Restored results of welding spot 1
    Restored results of welding spot 2
    • Table 1. Experimental results of standard gray images

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      Table 1. Experimental results of standard gray images

      MethodsMSEPSNRSSIM
      BoatIsotropic D-ADMM45.8531.550.836 7
      Anisotropic D-ADMM40.4932.100.857 7
      Isotropic proposed method31.0333.250.886 2
      Anisotropic proposed method31.2533.220.885 8
      CameramanIsotropic D-ADMM30.9233.260.844 2
      Anisotropic D-ADMM24.9034.200.885 4
      Isotropic proposed method12.6937.130.948 8
      Anisotropic proposed method12.8737.070.948 8
      LenaIsotropic D-ADMM34.5232.780.835 6
      Anisotropic D-ADMM29.0433.530.867 5
      Isotropic proposed method20.4235.060.909 5
      Anisotropic proposed method20.3235.090.910 0
      PeppersIsotropic D-ADMM36.5632.540.818 8
      Anisotropic D-ADMM31.4433.190.844 7
      Isotropic proposed method26.3933.950.876 7
      Anisotropic proposed method26.4233.950.876 5
    • Table 2. Experimental results of three integrated circuit X-ray images

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      Table 2. Experimental results of three integrated circuit X-ray images

      Capacitance elementWelding spot 1Welding spot 2
      LSGMGEILSGMGEILSGMGEI
      Isotropic D-ADMM0.0370.008 80.0850.0250.005 30.0480.0150.003 40.032
      Anisotropic D-ADMM0.0370.008 60.0840.0240.005 10.0460.0150.003 30.03
      Method of reference [40.0290.006 60.070.0140.002 70.0280.0130.002 20.022
      Isotropic proposed method0.0490.010 70.0920.0470.008 80.0590.0320.0060.040
      Anisotropic proposed method0.0490.010 70.0910.0470.008 80.0580.0320.0060.039
    • Table 3. Another ten integrated circuit X-ray images experimental results

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      Table 3. Another ten integrated circuit X-ray images experimental results

      12
      LSGMGEILSGMGEI
      Isotropic D-ADMM0.0240.0050.0510.0320.0080.080
      Anisotropic D-ADMM0.0240.0050.0480.0330.0080.077
      Method of reference [40.0170.0030.0340.0250.0060.064
      Isotropic proposed method0.0450.0090.0600.0530.0110.089
      Anisotropic proposed method0.0450.0090.0590.0540.0110.088
      34
      LSGMGEILSGMGEI
      Isotropic D-ADMM0.0310.0060.0550.0420.0090.075
      Anisotropic D-ADMM0.0300.0060.0520.0410.0080.072
      Method of reference [40.0160.0030.0300.0180.0040.038
      Isotropic proposed method0.0520.0100.0610.0720.0140.089
      Anisotropic proposed method0.0520.0090.0600.0720.0140.088
      56
      LSGMGEILSGMGEI
      Isotropic D-ADMM0.0270.0060.0530.0250.0050.048
      Anisotropic D-ADMM0.0270.0060.0510.0240.0050.046
      Method of reference [40.0170.0040.0370.0140.0030.028
      Isotropic proposed method0.0460.0090.0620.0470.0090.059
      Anisotropic proposed method0.0460.0090.0610.0470.0090.058
      78
      LSGMGEILSGMGEI
      Isotropic D-ADMM0.0360.0080.0690.0280.0060.055
      Anisotropic D-ADMM0.0350.0070.0660.0270.0060.052
      Method of reference [40.0180.0040.0390.0160.0030.033
      Isotropic proposed method0.0630.0120.0810.0500.0100.066
      Anisotropic proposed method0.0630.0120.0800.0500.0100.065
    • Table 3. Another ten integrated circuit X-ray images experimental results

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      Table 3. Another ten integrated circuit X-ray images experimental results

      910
      LSGMGEILSGMGEI
      Isotropic D-ADMM0.0260.0060.0520.0320.0070.061
      Anisotropic D-ADMM0.0250.0050.0500.0310.0070.058
      Method of reference [40.0170.0030.0340.0160.0030.034
      Isotropic proposed method0.0470.0090.0620.0560.0110.072
      Anisotropic proposed method0.0470.0090.0610.0560.0110.071
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    Ge MA, Sen LIN, Zhifu LI, Zhijia ZHAO, Tao ZOU. Multi-regularization image restoration method for X-ray images of integrated circuit[J]. Optics and Precision Engineering, 2022, 30(22): 2913

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    Paper Information

    Category: Information Sciences

    Received: Apr. 29, 2022

    Accepted: --

    Published Online: Nov. 28, 2022

    The Author Email: Tao ZOU (tzou@gzhu.edu.cn)

    DOI:10.37188/OPE.20223022.2913

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