Chinese Journal of Lasers, Volume. 36, Issue 5, 1205(2009)

Effects of Si1-xGex∶C buffers′ Growth Parameters on Ge films by Chemical Vapor Deposition

Ge Ruiping*, Han Ping, Wu Jun, Wang Ronghua, Yu Fei, Zhao Hong, Yu Huiqiang, Xie Zili, Zhang Rong, and Zheng Youdou
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    Ge Ruiping, Han Ping, Wu Jun, Wang Ronghua, Yu Fei, Zhao Hong, Yu Huiqiang, Xie Zili, Zhang Rong, Zheng Youdou. Effects of Si1-xGex∶C buffers′ Growth Parameters on Ge films by Chemical Vapor Deposition[J]. Chinese Journal of Lasers, 2009, 36(5): 1205

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    Paper Information

    Category: materials and thin films

    Received: Aug. 30, 2008

    Accepted: --

    Published Online: May. 22, 2009

    The Author Email: Ge Ruiping (rpge_nju@yahoo.com.cn)

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