Chinese Journal of Lasers, Volume. 36, Issue 5, 1205(2009)
Effects of Si1-xGex∶C buffers′ Growth Parameters on Ge films by Chemical Vapor Deposition
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Ge Ruiping, Han Ping, Wu Jun, Wang Ronghua, Yu Fei, Zhao Hong, Yu Huiqiang, Xie Zili, Zhang Rong, Zheng Youdou. Effects of Si1-xGex∶C buffers′ Growth Parameters on Ge films by Chemical Vapor Deposition[J]. Chinese Journal of Lasers, 2009, 36(5): 1205