[3] [3] RASAIENIA A,ASNAASHARI M,HEMMATI M.A robust controller design for piezoelectric positioning stage with Bouc-Wen hysteresis compensator［J］.Signal Processing and Renewable Energy,2019,3(2):49-62.

[7] [7] STORN R,PRICE K.Differential evolution-A simple and efficient heuristic for global optimization over continuous spaces［J］.Journal of global optimization,1997,11(4):341-359.

[8] [8] TENG Y,HUANG X,YE S,et al.Prediction of particulate matter concentration in Chengdu based on improved differential evolution algorithm and BP neural network model［C］//［S.l.］:2018 IEEE 3rd International Conference on Cloud Computing and Big Data Analysis (ICCCBDA),IEEE,2018:100-106.

[9] [9] LI R,CAO K,YU X,et al.Modeling and compensation algorithms of asymmetric nonlinearity for piezoelectric actuators based on Madelung's rules［J］.IEEE Transactions on Industrial Electronics,2020,68(11):11359-11368.

[10] [10] SON N N,VAN KIEN C,ANHH P H.Hysteresis compensation and adaptive control based evolutionary neural networks for piezoelectric actuator［J］.International Journal of Intelligent Systems,2021,36(10):5472-5492.