Fig. 1. Schematic of capsule profilometer setup.

Fig. 2. Photo of capsule profilometer.

Fig. 3. CCD video shots during measurement.

Fig. 4. The process steps of capsule center alignment.

Fig. 5. AFM tip and capsule.

Fig. 6. Measured surface traces in one orbit.

Fig. 7. Trace patterns for capsule measurement.

Fig. 8. Traces (a) before and (b) after capsule repositioning of $360^{\circ }$.

Fig. 9. Noise power spectra.

Fig. 10. Orbits covering the complete surface.

Fig. 11. Surface reconstruction with different orders.

Fig. 12. (a) Surface profile traces and (b) corresponding 1D mode-power spectrum.

Fig. 13. 2D power spectrum curve.

Fig. 14. Power spectrum curves with (a) good surface quality and (b) bad surface quality.