Modulation Growth and Surface Hydrogenation Treatment of ZnO∶W Transparent Conductive Films

Keyan Hu; Yichuan Chen; Xiaohua Zhang; Wenjun Zhu; Weiqiang Shuai; Yuehui Hu

doi:10.3788/AOS201838.0531001

Acta Optica Sinica, Volume. 38, Issue 5, 0531001(2018)

Modulation Growth and Surface Hydrogenation Treatment of ZnO∶W Transparent Conductive Films

Keyan Hu, Yichuan Chen, Xiaohua Zhang, Wenjun Zhu, Weiqiang Shuai, and Yuehui Hu^*

Author Affiliations

School of Mechanical and Electrical Engineering, Jingdezhen Ceramic Institute, Jingdezhen, Jiangxi 333403, China

show less

Abstract Get PDF(in Chinese)

Figures & Tables(10)

Fig. 1. Schematic of preparation for ZnO∶W transparent conductive films

Download full size

Fig. 2. Surface SEM images of ZnO∶W films. (a) W-1; (b) WH-1; (c) W-2; (d) WH-2; (e) W-3; (f) WH-3

Download full size

Fig. 3. Fourier transformed infrared spectra for samples of W-3 and WH-3 under different wavenumber ranges. (a) 1400~1900 cm-1; (b) 3200~4000 cm-1

Download full size

Fig. 4. Schematic of light trapping

Download full size

Fig. 5. XRD patterns for different samples

Download full size

Fig. 6. Surface XPS pattern for sample of WH-2

Download full size

Fig. 7. Photoluminescence spectra for all samples under 325 nm xenon lamp excitation

Download full size

Fig. 8. Fitting curve of characteristic peaks in photoluminescence spectrum for sample of WH-3

Download full size

Table 1. Surface-textured characteristics for different samples at wavelength of 550 nm

View table

Table 1. Surface-textured characteristics for different samples at wavelength of 550 nm

Sample No.	Sputtering power /W	Sputtering time /min+hydrogenation time /min	$\begin{matrix} {L_{T}}_{} \end{matrix}$ /%	$\begin{matrix} {T_{T}}_{} \end{matrix}$ /%	$\begin{matrix} {H_{aze}}_{} \end{matrix}$ /%	C_I
W-1	100	55+0	76.98	81.35	5.37	86.72
W-2	200	55+0	76.80	80.32	4.38	84.70
W-3	300	55+0	75.47	79.03	4.50	83.53
WH-1	100	55+8	75.33	82.03	8.17	90.20
WH-2	200	55+8	74.09	82.56	10.26	92.82
WH-3	300	55+8	72.93	82.24	11.32	93.56

Table 2. Carrier concentration, carrier mobility and corresponding resistivity of WH-1, WH-2 and WH-3
View table
Table 2. Carrier concentration, carrier mobility and corresponding resistivity of WH-1, WH-2 and WH-3
Sample Carrier concentration /cm^-3 Holl mobility /(cm²·V^-1·S^-1) Electrical resistivity /(Ω·cm)
WH-1 1.42×10²¹ 5.52 7.97×10^-4
WH-2 1.74×10²¹ 9.12 3.93×10^-4
WH-3 7.04×10²⁰ 4.55 1.95×10^-3

Tools

Get Citation

Copy Citation Text

Keyan Hu, Yichuan Chen, Xiaohua Zhang, Wenjun Zhu, Weiqiang Shuai, Yuehui Hu. Modulation Growth and Surface Hydrogenation Treatment of ZnO∶W Transparent Conductive Films[J]. Acta Optica Sinica, 2018, 38(5): 0531001

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Thin films

Received: Nov. 13, 2017

Accepted: --

Published Online: Jul. 10, 2018

The Author Email: Hu Yuehui ( 8489023@163.com)

DOI:10.3788/AOS201838.0531001

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. Surface-textured characteristics for different samples at wavelength of 550 nm

Table 1. Surface-textured characteristics for different samples at wavelength of 550 nm

Table 2. Carrier concentration, carrier mobility and corresponding resistivity of WH-1, WH-2 and WH-3

Table 2. Carrier concentration, carrier mobility and corresponding resistivity of WH-1, WH-2 and WH-3