Infrared and Laser Engineering, Volume. 51, Issue 9, 20220118(2022)

Full-field heterodyne phase shifting two-wavelength interferometry surface testing technologies

Guoxiang Fan1,2,3, Yang Li1,2,3、*, Wenxi Zhang1,2,3, Zhou Wu1,2,3, and Tong Lv1,2
Author Affiliations
  • 1Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China
  • 2Key Laboratory of Computational Optical Imaging Technology, Chinese Academy of Sciences, Beijing 100094, China
  • 3School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100094, China
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    CLP Journals

    [1] Jinlong Cheng, Liyan Zhu, Lu Chen, Zhongming Yang, Zhishan Gao, Qun Yuan. Dual-wavelength interferometric algorithm based on spatial-temporal conjugate complex function coupling[J]. Infrared and Laser Engineering, 2024, 53(4): 20230661

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    Guoxiang Fan, Yang Li, Wenxi Zhang, Zhou Wu, Tong Lv. Full-field heterodyne phase shifting two-wavelength interferometry surface testing technologies[J]. Infrared and Laser Engineering, 2022, 51(9): 20220118

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    Paper Information

    Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface

    Received: Feb. 22, 2022

    Accepted: --

    Published Online: Jan. 6, 2023

    The Author Email:

    DOI:10.3788/IRLA20220118

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