Infrared and Laser Engineering, Volume. 51, Issue 9, 20220118(2022)
Full-field heterodyne phase shifting two-wavelength interferometry surface testing technologies
[1] L Deck, P D Groot. High-speed noncontact profiler based on scanning white-light interferometry. Applied Optics, 33, 7334-7338(1994).
[2] Xiaokun Wang. Measurement of large aspheric surface by stitching and coordinate measuring machine. Infrared and Laser Engineering, 43, 3410-3415(2014).
[3] [3] Stedman M , Lindsey K . Limits of surface measurement by stylus instruments [C]Proceedings of SPIE, 1989, 1009: 5661.
[4] Dong Liu, Tianliang Yan, Daodang Wang, et al. Review of fringe-projection profilometry and phase measuring deflectometry. Infrared and Laser Engineering, 46, 0917001(2017).
[5] F Mohammadi, J Kofman. Multi-wavelength digital-phase-shifting Moiré based on Moiré wavelength. Applied Sciences, 9, 1917(2019).
[6] Y Y Cheng, J C Wyant. Two-wavelength phase shifting inter-ferometry. Applied Optics, 23, 4539(1985).
[7] Y Ishii, R Onodera. Two-wavelength laser-diode interferometry that uses phase-shifting techniques. Optics Letters, 16, 1523-1525(1991).
[8] P Hariharan, M Roy. Achromatic phase-shifting for two-wavelength phase-stepping interferometry. Optics Communi-cations, 126, 220-222(1996).
[9] [9] NthMris M B, Millerd J E, Brock N J, et al. Phaseshifting multiwavelength dynamic interferometer [C]Proceedings of SPIE, 2004, 5531: 6475.
[10] H C Hsieh, Y L Chen, Z C Jian, et al. Two-wavelength full-field heterodyne interferometric profilometry. Measurement Science & Technology, 20, 025307(2009).
[14] [14] Chen Jinlong. Research on the technology f the high precision testing of the threedimensional shape with steps by dualwavelength phase shift interferometry[D]. Nanjing: Nanjing University of Science Technology, 2018. (in Chinese)
[15] Wanqi Shang, Wenxi Zhang, Zhou Wu, et al. Three-dimensional measurement system based on full-field heterogyne inter-ferometry. Optics and Precision Engineering, 27, 2097-2104(2019).
[16] Hongwu Ru, Lingling Wu, Wenxi Zhang, et al. Full-field heterodyne white light interferometry. Opto-Electronic Engineering, 47, 190617(2020).
[17] Zhou Wu, Yang Li, Bin Xiangli, et al. Full-field hetreodyne long-cavity interferometry. Acta Optic Sinica, 0912003(2019).
[18] Tong Lv, Wenxi Zhang, Xiaoyu Lu, et al. Full-field heterdyne short coherent topography measurement technology. Optics and Precision Engineering, 28, 800-807(2020).
[19] Y Y Cheng, J C Wyant. Phase shifter calibration in phase-shifting interferometry. Applied Optics, 24, 3049-3052(1985).
[20] [20] Creath K. Comparison of phasemeasurement algithms [C]Proceedings of SPIE, 1987, 0680: 939587.
[21] Z Malacara, Malacara D. Design of lenses to project the image of a pupil in optical testing interferometers. Applied Optics, 34, 739-742(1995).
[22] [22] Tkaczyk T S, Jozwicki R. Experimental numerical models of a field heterodyne interferometer: Discussion on optical influences in measurements [C]Proceedings of SPIE, 2000, 4076: 397950.
[24] Yingjie Yu, Lin Chang, Ketao Yan, et al. Information separation of multu-surface based on wavelength phase shifting interferometry. Infrared and Laser Engineering, 49, 0303014(2020).
[25] K Creath, Y-Y Cheng, J C Wyant. Contouring aspheric surfaces using two-wavelength phase-shifting interferometry. Optica Acta, 32, 1455-1464(1985).
[26] Huaying Wang, Zuoqiang Liu, Wei Liao, et al. Comparison of four phases unwrapping algorithm based on method of minimum norm. Chinese Journal of Lasers, 41, 0209016(2014).
Get Citation
Copy Citation Text
Guoxiang Fan, Yang Li, Wenxi Zhang, Zhou Wu, Tong Lv. Full-field heterodyne phase shifting two-wavelength interferometry surface testing technologies[J]. Infrared and Laser Engineering, 2022, 51(9): 20220118
Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface
Received: Feb. 22, 2022
Accepted: --
Published Online: Jan. 6, 2023
The Author Email: