Infrared and Laser Engineering, Volume. 51, Issue 9, 20220118(2022)

Full-field heterodyne phase shifting two-wavelength interferometry surface testing technologies

Guoxiang Fan1,2,3, Yang Li1,2,3、*, Wenxi Zhang1,2,3, Zhou Wu1,2,3, and Tong Lv1,2
Author Affiliations
  • 1Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China
  • 2Key Laboratory of Computational Optical Imaging Technology, Chinese Academy of Sciences, Beijing 100094, China
  • 3School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100094, China
  • show less
    References(22)

    [1] Deck L, Groot P D. High-speed noncontact profiler based on scanning white-light interferometry[J]. Applied Optics, 33, 7334-7338(1994).

    [2] Wang Xiaokun. Measurement of large aspheric surface by stitching and coordinate measuring machine[J]. Infrared and Laser Engineering, 43, 3410-3415(2014).

    [3] [3] Stedman M , Lindsey K . Limits of surface measurement by stylus instruments [C]Proceedings of SPIE, 1989, 1009: 5661.

    [4] Liu Dong, Yan Tianliang, Wang Daodang, et al. Review of fringe-projection profilometry and phase measuring deflectometry[J]. Infrared and Laser Engineering, 46, 0917001(2017).

    [5] Mohammadi F, Kofman J. Multi-wavelength digital-phase-shifting Moiré based on Moiré wavelength[J]. Applied Sciences, 9, 1917(2019).

    [6] Cheng Y Y, Wyant J C. Two-wavelength phase shifting inter-ferometry[J]. Applied Optics, 23, 4539(1985).

    [7] Ishii Y, Onodera R. Two-wavelength laser-diode interferometry that uses phase-shifting techniques[J]. Optics Letters, 16, 1523-1525(1991).

    [8] Hariharan P, Roy M. Achromatic phase-shifting for two-wavelength phase-stepping interferometry[J]. Optics Communi-cations, 126, 220-222(1996).

    [9] [9] NthMris M B, Millerd J E, Brock N J, et al. Phaseshifting multiwavelength dynamic interferometer [C]Proceedings of SPIE, 2004, 5531: 6475.

    [10] Hsieh H C, Chen Y L, Jian Z C, et al. Two-wavelength full-field heterodyne interferometric profilometry[J]. Measurement Science & Technology, 20, 025307(2009).

    [14] [14] Chen Jinlong. Research on the technology f the high precision testing of the threedimensional shape with steps by dualwavelength phase shift interferometry[D]. Nanjing: Nanjing University of Science Technology, 2018. (in Chinese)

    [15] Shang Wanqi, Zhang Wenxi, Wu Zhou, et al. Three-dimensional measurement system based on full-field heterogyne inter-ferometry[J]. Optics and Precision Engineering, 27, 2097-2104(2019).

    [16] Ru Hongwu, Wu Lingling, Zhang Wenxi, et al. Full-field heterodyne white light interferometry[J]. Opto-Electronic Engineering, 47, 190617(2020).

    [17] Wu Zhou, Li Yang, Xiangli Bin, et al. Full-field hetreodyne long-cavity interferometry[J]. Acta Optic Sinica, 0912003(2019).

    [18] Lv Tong, Zhang Wenxi, Lu Xiaoyu, et al. Full-field heterdyne short coherent topography measurement technology[J]. Optics and Precision Engineering, 28, 800-807(2020).

    [19] Cheng Y Y, Wyant J C. Phase shifter calibration in phase-shifting interferometry[J]. Applied Optics, 24, 3049-3052(1985).

    [20] [20] Creath K. Comparison of phasemeasurement algithms [C]Proceedings of SPIE, 1987, 0680: 939587.

    [21] Malacara Z, D Malacara. Design of lenses to project the image of a pupil in optical testing interferometers[J]. Applied Optics, 34, 739-742(1995).

    [22] [22] Tkaczyk T S, Jozwicki R. Experimental numerical models of a field heterodyne interferometer: Discussion on optical influences in measurements [C]Proceedings of SPIE, 2000, 4076: 397950.

    [24] Yu Yingjie, Chang Lin, Yan Ketao, et al. Information separation of multu-surface based on wavelength phase shifting interferometry[J]. Infrared and Laser Engineering, 49, 0303014(2020).

    [25] Creath K, Cheng Y-Y, Wyant J C. Contouring aspheric surfaces using two-wavelength phase-shifting interferometry[J]. Optica Acta, 32, 1455-1464(1985).

    [26] Wang Huaying, Liu Zuoqiang, Liao Wei, et al. Comparison of four phases unwrapping algorithm based on method of minimum norm[J]. Chinese Journal of Lasers, 41, 0209016(2014).

    CLP Journals

    [1] Jinlong Cheng, Liyan Zhu, Lu Chen, Zhongming Yang, Zhishan Gao, Qun Yuan. Dual-wavelength interferometric algorithm based on spatial-temporal conjugate complex function coupling[J]. Infrared and Laser Engineering, 2024, 53(4): 20230661

    Tools

    Get Citation

    Copy Citation Text

    Guoxiang Fan, Yang Li, Wenxi Zhang, Zhou Wu, Tong Lv. Full-field heterodyne phase shifting two-wavelength interferometry surface testing technologies[J]. Infrared and Laser Engineering, 2022, 51(9): 20220118

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Special issue—Ultra precision manufacture and testing technology of optical aspheric surface

    Received: Feb. 22, 2022

    Accepted: --

    Published Online: Jan. 6, 2023

    The Author Email:

    DOI:10.3788/IRLA20220118

    Topics