Spectroscopy and Spectral Analysis, Volume. 36, Issue 1, 27(2016)
Optical Properties of ZnO Films Fabricated by Atomic Layer Deposition
[1] [1] Sun Yanming, Seo Jung Hwa, Takacs Christopher J Seifter Jason, et al. Advanced Materials, 2011, 23(14): 1679.
[2] [2] Liang Zhiqiang, Zhang Qifeng, Li Chundong, et al. Advanced Functional Materials, 2012, 22(10): 2194.
[3] [3] Afshar Amir, Cadien Kenneth C. Applied Physics Letters, 2013, 103(25): 251906.
[4] [4] Tynell Tommi, Karppinen Maarit. Semiconductor Science and Technology, 2014, 29(4): 043001.
[5] [5] Wang Jen-chun, Weng Wei-tse, Yu Chih-chieh, et al. Journal of Materials Chemistry. 2010, 20: 862.
[6] [6] Gilot Jan, Barbu Ionut, Janssen René A J. Applied Physics Letters, 2007, 91(11): 113520.
[7] [7] Major S, Kumar S. Applied Physics Letters, 1986, 49: 394.
[8] [8] Yu C, Chen S, Sun S. Applied Surface Science, 2011, 257: 6498.
[10] [10] Amir Afshar, Kenneth C. Cadien: Applied Physics Letters, 2013, 103: 251906(1-5).
[11] [11] Jenos S, Bang S, Lee S. Journal of the Electrochemical Society, 2008, 155: 738.
[14] [14] Hwang Y H, Kim H M, Um Y H, et al. Materials Research Bulletin, 2012, 47: 2898.
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ZHANG Chun-mei, WANG Dong-dong, FANG Ming, ZHANG Ao, WANG Xiao-yu, CHEN Qiang, MENG Tao. Optical Properties of ZnO Films Fabricated by Atomic Layer Deposition[J]. Spectroscopy and Spectral Analysis, 2016, 36(1): 27
Received: Jun. 4, 2015
Accepted: --
Published Online: Feb. 2, 2016
The Author Email: Chun-mei ZHANG (zhangchunmei@bjgc.edu.cn)
CSTR:32186.14.