Journal of Infrared and Millimeter Waves, Volume. 40, Issue 4, 432(2021)
Correlation between Everson etch pits and material defects of (112) B CdZnTe substrates
Fig. 1. Everson etch pits of different shapes on CdZnTe (112)B surface
Fig. 2. Changes of etch pit geometries and positions on the (112) B surface during secondary etching
Fig. 3. Relations of etch pits on the (112)B surface and flat-bottom etch pits with different D/Ws on the (111)B surface (a) micrographs of etch pits with different D/Ws on the (111)B surface, (b) schematic diagrams of flat-bottom etch pits sectioned by (112) plane, (c) micrographs of etch pits observed on the (112)B surface coinciding with the geometries in (b)
Fig. 4. Pyramidal etch pits of extending defects oriented in <110> and <112> on the (111)B surface (a) [101] orietation, (b) [011] orientation, (c) [110] orientation, (d) [211] orientation, (e) [121] orientation, (f) [112] orientation
Fig. 5. Typical Everson etch pits on CdZnTe (112)B surface (a) <110> extending defects, (b) <112> extending defects, (c) <123> extending defects
Fig. 6. Orientation distributions of the extending defects in CdZnTe substrate samples on the (112) polar figure. The diamond points are the orientations of the extending defects observed by etch pit real-time observation technology on the (111)A surfaces . The observed area of the samples is 897.7 µm × 670 µm (a) sample M4834, (b) sample K4911
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Chang-He ZHOU, Jian-Rong YANG, Mei-Hua ZHOU, Chao XU. Correlation between Everson etch pits and material defects of (112) B CdZnTe substrates[J]. Journal of Infrared and Millimeter Waves, 2021, 40(4): 432
Category: Research Articles
Received: Aug. 15, 2020
Accepted: --
Published Online: Sep. 9, 2021
The Author Email: Chang-He ZHOU (changhez@mail.sitp.ac.cn)