Optics and Precision Engineering, Volume. 17, Issue 6, 1344(2009)

Micro-machined vibrating ring gyroscope

CHEN Li*, CHEN De-yong, and WANG Jun-bo
Author Affiliations
  • [in Chinese]
  • show less
    References(8)

    [1] [1] AYAZIF ,NAJAFIK. A HARPSS polysilicon vibrating ring gyroscope[J].Journal of Microelectromechanical Systems,2001,10:169-179.

    [2] [2] KIM D J.A systematic method for tuning the dynamics of electrostaically actuated vibratory gyros[J].IEEE Trans.of Control Syst. Technology,2006,14:69-81.

    [3] [3] WENG J H,CHIENG W H,LAI J M. Structural design and analysis of micromachined ring-type vibrating sensor of both yaw rate and linear acceleration[J].Sensors and Actuators A, 2005,117:230-240.

    [4] [4] AYAZIF , CHEN H H,KOCER F,et al..A high aspect-ratio polysilicon vibrating ring gyroscope[C].Solid-state sensor and Actuator Workshop,Hilton Head,SC,2000:289-292.

    [5] [5] JIANG M, HE X Y.Optical testing of dynamic characteristic of vibrating wheel micromechanical gyroscope[J].Opt.Precision Eng.,2008,16(2):295-299.(in Chinese)

    [6] [6] LIJL,FANG J C, SHENG W,et al.. Calculation and simulation of silicon MEMS gyroscope with dual-mass resonant output[J].Opt. Precision Eng.,2008,16(3):484-491.(in Chinese)

    [7] [7] TIMOSHENKO S,YOUNG D H. Vibration Problems in Engineering [M]. 3rd ed. New York D.Van Nostrand Company Inc.,1955:427-430.

    [8] [8] PUTTY M W. A micro-machined vibrating ring gyroscope[D].Michigan:Univ.Michigan,1995.

    CLP Journals

    [1] LI Yu-xin, CHEN De-yong, WANG Jun-bo, JIAO Hai-long, LUO Zhen-yu. H type micro-machined resonant pressure sensor based on self-stopped etch technique[J]. Optics and Precision Engineering, 2011, 19(12): 2927

    Tools

    Get Citation

    Copy Citation Text

    CHEN Li, CHEN De-yong, WANG Jun-bo. Micro-machined vibrating ring gyroscope[J]. Optics and Precision Engineering, 2009, 17(6): 1344

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Received: Jan. 20, 2009

    Accepted: --

    Published Online: Aug. 28, 2009

    The Author Email: CHEN Li (xuefeng1025@163.com)

    DOI:

    Topics