Fig. 1. Experimental setup for blackbody radiation measurement of ultrafast laser micro-processing

Fig. 2. Blackbody radiation transient spectra collection of ultrafast laser micro-processing. (a) Blackbody radiation transient spectra collection at τ₁; (b) time-resolved blackbody radiation transient spectra collection from τ₁ to τ_n

Fig. 3. Transient measurement results of blackbody radiation spectra on the surface of silicon wafer induced by femtosecond laser

Fig. 4. Transient measurement results of blackbody radiation spectra on the surface of copper plate induced by femtosecond laser

Fig. 5. Planck fitting of blackbody radiation spectra on the surface of silicon wafer induced by femtosecond laser. (a) 1 ns; (b) 3 ns; (c) 4 ns; (d) 9 ns

Fig. 6. Planck fitting of blackbody radiation spectra on the surface of copper plate induced by femtosecond laser. (a) 4 ns; (b) 6 ns; (c) 16 ns; (d) 30 ns

Fig. 7. Time-resolved relative error of temperature measurement. (a) Silicon wafer; (b) copper plate

Fig. 8. Fitting of temperature decay using finite difference method for heat diffusion. (a) Silicon wafer; (b) copper plate