[2] [2] MOLCHANOVA Y S, BYCHKOV N A, CHERNYAYEV S I. Producing orifices in structural materials by plasma, waterjet and laser cutting and piercing［J］. Welding International, 2015, 29(2): 161-164.

[3] [3] LING T Y, PUI D Y H. Characterization of nanoparticles from abrasive waterjet machining and electrical discharge machining processes［J］. Environmental Science & Technology, 2013, 47(22): 12721-12727.

[4] [4] NAU B, RODERBUGA, KLOCKE F. Ramp-up of hybrid manufacturing technologies［J］. CIRP Journal of Manufacturing Science and Technology, 2011, 4(3): 313-316.

[5] [5] SUN D, HAN F Z, YING W S, et al. Surface integrity of water jet guided laser machining of CFRP［J］. Procedia CIRP, 2018, 71: 71-74.

[7] [7] FENG S C, HUANG C Z, WANG J, et al. Surface quality evaluation of single crystal 4H-SiC wafer machined by hybrid laser-waterjet: Comparing with laser machining［J］. Materials Science in Semiconductor Processing, 2019, 93: 238-251.

[8] [8] MELAIBARI A, MOLIAN P, SHROTRIYA P. Two-dimensional contour cutting of polycrystalline cubic boron nitride using a novel laser/water jet hybrid process［J］. The International Journal of Advanced Manufacturing Technology, 2012, 63(5-8): 641-649.

[10] [10] PIWCZYK B P. Gas assisted laser cutting of thin and fragile materials: US09690161［P/OL］. (2002-07-23) ［2021-12-21］. http://www.google.com /free patents online/ US09690161.

[15] [15] WU Z R. The mechanism governing cutting of hard materials with hybrid Laser/Waterjet system through controlled fracture［D］. Hall Ames: Iowa State University, 2015.