Fig. 1. Schematic of the silicon-organic hybrid integrated MZM

Fig. 2. Schematic diagram of the modulation region of the silicon-organic hybrid integrated electro-optical modulator. (a) Three-dimensional structure; (b) cross-section of waveguide electrode

Fig. 3. Molecular structure of chromophore

Fig. 4. Circuit model of electrode transmission line

Fig. 5. Equivalent circuit for a unit length of transmission line

Fig. 6. Frequency response of MZM with different electrode characteristic impedances

Fig. 7. Electro-optic modulation frequency response with different microwave effective refractive indexes

Fig. 8. S-parameter of modulator coplanar waveguide electrode. (a) S₂₁; (b) S₁₁

Fig. 9. Parameters of modulator electrode. (a) Microwave effective refractive index; (b) characteristic impedance

Fig. 10. SEM photos of waveguide grating coupler. (a) General structure; (b) partial zoom-in structure

Fig. 11. SEM photos of silicon based multimode interference coupler. (a) General structure; (b) partial zoom-in structure

Fig. 12. Silicon slot waveguide modulator chip and its optical microscope photographs

Fig. 13. Measurement results of electrical S-parameter of the modulator

Fig. 14. Electrode parameters obtained by S-parameter. (a) Microwave effective refractive index; (b) electrode characteristic impedance

Fig. 15. Electro-optical response of the modulator simulated with measured electrical S-parameter

Fig. 16. Measured electro-optic modulation response curve of silicon-organic hybrid integrated modulator