Acta Optica Sinica, Volume. 5, Issue 7, 619(1985)
Sensitivity factor of reflectance to the change of film thickness in ellipsometry
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WANG ZHIGANG, DING LANTING. Sensitivity factor of reflectance to the change of film thickness in ellipsometry[J]. Acta Optica Sinica, 1985, 5(7): 619
Paper Information
Category: Thin Films
Received: Oct. 12, 1984
Accepted: --
Published Online: Sep. 16, 2011
The Author Email:
CSTR:32186.14.
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