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Acta Optica Sinica, Volume. 41, Issue 9, 0911004(2021)

Local Level Set Based Mask Optimization with Semi-Implicit Discretization

Yijiang Shen1、*, Xiaopeng Wang1, Yanzhou Zhou1, and Zhenrong Zhang2
Author Affiliations
  • 1School of Automation, Guangdong University of Technology, Guangzhou, Guangdong 510006, China
  • 2School of Computer, Electronics and Information, Guangxi University, Nanning, Guangxi 530004, China
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    Article index updated: Sep. 6, 2025

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    Yijiang Shen, Xiaopeng Wang, Yanzhou Zhou, Zhenrong Zhang. Local Level Set Based Mask Optimization with Semi-Implicit Discretization[J]. Acta Optica Sinica, 2021, 41(9): 0911004

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    Paper Information

    Category: Imaging Systems

    Received: Jul. 22, 2020

    Accepted: Dec. 2, 2020

    Published Online: May. 8, 2021

    The Author Email: Yijiang Shen (yjshen@gdut.edu.cn)

    DOI:10.3788/AOS202141.0911004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology