[1] [1] NAKAMURA S, MUKAI T, SENOH M. Candela-class high-brightness InGaN/AlGaN double-heterostructure blue-light-emitting diodes ［J］. Applied Physics Letters, 1994, 64(13): 1687-1689.

[2] [2] DENBAARS S, THIBEAULT B. Micro-led array with enhanced light extraction: EP, 2325904 ［P］. 2000-11-20.

[3] [3] JIN S X, LI J, LI J Z, et al. GaN microdisk light emitting diodes ［J］. Applied Physics Letters, 2000, 76(5): 631-633.

[4] [4] JIANG H X, JIN S X, LI J, et al. III-nitride blue microdisplays ［J］. Applied Physics Letters, 2001, 78(9): 1303-1305.

[5] [5] LIU Z J, WONG K M, KEUNG C W, et al. Monolithic LED microdisplay on active matrix substrate using flip-chip technology ［J］. IEEE Journal of Selected Topics in Quantum Electronics, 2009, 15(4): 1298-1302.

[6] [6] LIU Z J, WONG K M, CHONG W C, et al. Active matrix programmable monolithic Light Emitting Diodes on Silicon (LEDoS) displays ［J］. SID Symposium Digest of Technical Papers, 2011, 42(1): 1215-1218.

[7] [7] LIU Z J, CHONG W C, WONG K M, et al. A novel BLU-free full-color LED projector using LED on silicon micro-displays ［J］. IEEE Photonics Technology Letters, 2013, 25(23): 2267-2270.

[8] [8] TULL B R, BASARAN Z, GIDONY D, et al. High brightness, emissive microdisplay by integration of Ⅲ-Ⅴ LEDs with thin film silicon transistors ［J］. SID Symposium Digest of Technical Papers, 2015, 46(1): 375-377.

[9] [9] HAN H V, LIN H Y, LIN C C, et al. Resonant-enhanced full-color emission of quantum-dot-based micro LED display technology ［J］. Optics Express, 2015, 23(25): 32504-32515.

[10] [10] CHOI M, JANG B, LEE W, et al. Stretchable active matrix inorganic light-emitting diode display enabled by overlay-aligned roll-transfer printing ［J］. Advanced Functional Materials, 2017, 27(11): 1606005.

[11] [11] FAN Z Y, LIN J Y, JIANG H X. Ⅲ-nitride micro-emitter arrays: development and applications ［J］. Journal of Physics D: Applied Physics, 2008, 41(9): 094001.

[12] [12] XIA J Y, ZHAO G N, YAO Z B, et al. Development of high-yield laser lift-off process for micro LED display ［J］. SID Symposium Digest of Technical Papers, 2020, 51(1): 1688-1690.

[13] [13] LIU Z J, LIN C H, HYUN B R, et al. Micro-light-emitting diodes with quantum dots in display technology ［J］. Light: Science & Applications, 2020, 9(1): 83.

[14] [14] LEE H E, SHIN J H, PARK J H, et al. Micro light-emitting diodes for display and flexible biomedical applications ［J］. Advanced Functional Materials, 2019, 29(24): 1808075.

[15] [15] TAMAKI M, SUZUKI T, AOKI K, et al. A 3.9-inch LTPS TFT full color MicroLED display with novel driving and reflector cavity process ［J］. SID Symposium Digest of Technical Papers, 2020, 51(1): 111-114.

[18] [18] VIREY E H, BARON N, BOUHAMRI Z. Overlooked challenges for microLED displays ［J］. SID Symposium Digest of Technical Papers, 2019, 50(1): 129-132.

[19] [19] CHEN P H, SHIH Y C, CHEN Y C. Micro LED display panel and manufacturing method thereof: US, 10748880 ［P］. 2020-08-18.

[20] [20] ZHANG S N, ZHANG J, GAO J D, et al. Efficient emission of InGaN-based light-emitting diodes: toward orange and red ［J］. Photonics Research, 2020, 8(11): 1671-1675.

[21] [21] BOWER C A, MEITL M A, BONAFEDE S, et al. Heterogeneous integration of microscale compound semiconductor devices by micro-transfer-printing ［C］//Proceedings of the IEEE 65th Electronic Components and Technology Conference (ECTC). San Diego, CA, USA: IEEE, 2015: 963-967.

[22] [22] GOMEZ D, GHOSAL K, MOORE T, et al. Scalability and yield in elastomer stamp micro-transfer-printing ［C］//Proceedings of the IEEE 67th Electronic Components and Technology Conference (ECTC). Orlando, FL, USA: IEEE, 2017: 1779-1785.

[23] [23] EZHILARASU G, HANNA A, PARANJPE A, et al. High yield precision transfer and assembly of GaN LEDs using laser assisted micro transfer printing ［C］//Proceedings of the IEEE 69th Electronic Components and Technology Conference (ECTC). Las Vegas, NV, USA: IEEE, 2019: 1470-1474.

[24] [24] SASAKI K, SCHUELE P J, ULMER K, et al. System and method for the fluidic assembly of emissive displays: US, 20170133558 ［P］. 2017-05-11.

[25] [25] HUANG Y G, TAN G J, GOU F W, et al. Prospects and challenges of mini-LED and micro-LED displays ［J］. Journal of the Society for Information Display, 2019, 27(7): 387-401.

[26] [26] PENG D, ZHANG K, CHAO V S D, et al. Full-color pixelated-addressable light emitting diode on transparent substrate (LEDoTS) micro-displays by CoB ［J］. Journal of Display Technology, 2016, 12(7): 742-746.

[27] [27] KANG C M, LEE J Y, KONG D J, et al. Hybrid full-color inorganic light-emitting diodes integrated on a single wafer using selective area growth and adhesive bonding ［J］. ACS Photonics, 2018, 5(11): 4413-4422.

[28] [28] LIN H Y, SHER C W, HSIEH D H, et al. Optical cross-talk reduction in a quantum-dot-based full-color micro-light-emitting-diode display by a lithographic-fabricated photoresist mold ［J］. Photonics Research, 2017, 5(5): 411-416.

[29] [29] EL-GHOROURY H S, YEH M, CHEN J C, et al. Growth of monolithic full-color GaN-based LED with intermediate carrier blocking layers ［J］. AIP Advances, 2016, 6(7): 075316.

[30] [30] GOU F W, HSIANG E L, WU S T. Angular color shift and power consumption of RGB micro-LED displays ［J］. Semiconductors and Semimetals, 2021, doi: 10.1016/bs.semsem.2020.12.003.

[32] [32] NOMURA K, HORII Y, KOSHI T, et al. Fine pattern formation with solder paste using screen printing with stainless steel mesh-cut screen mask ［J］. Journal of Micromechanics and Microengineering, 2020, 30(11): 115023.

[34] [34] DAI J, YU B L, YANG L, et al. Microstructure and mechanical properties of ultrasonically assisted brazing of dissimilar Cu-Al alloys ［J］. Science of Advanced Materials, 2020, 12(5): 733-739.

[35] [35] MARION F, BISOTTO S, BERGER F, et al. A room temperature flip-chip technology for high pixel count micro-displays and imaging arrays ［C］//Proceedings of the IEEE 66th Electronic Components and Technology Conference (ECTC). Las Vegas, NV, USA: IEEE, 2016: 929-935.

[36] [36] TEMPLIER F. GaN-based emissive microdisplays: a very promising technology for compact, ultra-high brightness display systems ［J］. Journal of the Society for Information Display, 2016, 24(11): 669-675.

[37] [37] LIU Z J, CHONG W C, WONG K M, et al. 360 PPI flip-chip mounted active matrix addressable light emitting diode on silicon (LEDoS) micro-displays ［J］. Journal of Display Technology, 2013, 9(8): 678-682.

[39] [39] ZHENG L L, GUO Z Q, YAN W, et al. Research on a camera-based microscopic imaging system to inspect the surface luminance of the micro-LED array ［J］. IEEE Access, 2018, 6: 51329-51336.

[43] [43] BOWER C A, MEITL M A, RAYMOND B, et al. Emissive displays with transfer-printed assemblies of 8 μm× 15 μm inorganic light-emitting diodes ［J］. Photonics Research, 2017, 5(2): A23-A29.

[44] [44] DAY J, LI J, LIE D Y C, et al. Full-scale self-emissive blue and green Microdisplays based on GaN Micro-LED arrays ［C］//Proceedings of SPIE 8268, Quantum Sensing and Nanophotonic Devices Ⅸ. San Francisco, California, United States: SPIE, 2012: 82681X-1.

[46] [46] VIREY E H, BARON N, BOUHAMRI Z. MicroLED display technology trends and intellectual property landscape ［J］. SID Symposium Digest of Technical Papers, 2020, 51(1): 436-439.