Holographic Lithography Techniques (Invited)

Yuyang Liu; Dongchao Pan; Diyu Fu; Sikun Li

doi:10.3788/CJL240795

Chinese Journal of Lasers, Volume. 51, Issue 12, 1202405(2024)

Holographic Lithography Techniques (Invited)

Yuyang Liu^1,2, Dongchao Pan^1,2, Diyu Fu^1,2, and Sikun Li^1,2、*

¹Department of Advanced Optical and Microelectronic Equipment, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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Yuyang Liu, Dongchao Pan, Diyu Fu, Sikun Li. Holographic Lithography Techniques (Invited)[J]. Chinese Journal of Lasers, 2024, 51(12): 1202405

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Paper Information

Category: Laser Micro-Nano Manufacturing

Received: Apr. 22, 2024

Accepted: May. 16, 2024

Published Online: Jun. 7, 2024

The Author Email: Sikun Li (lisikun@siom.ac.cn)

DOI:10.3788/CJL240795

CSTR:32183.14.CJL240795

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology