[8] [8] Larry J Hornbeck. J. MEMS, 2004, 13(2): 272.

[11] [11] Kyaft M, Kenda A, Frank A, et al. Anal. Bioanal. Chem., 2006, 386

          (12): 1259.

[12] [12] GELLER Yariv, RAMANI Mouli. Photonic Applications in Devices and

          Communication Systems, 2005, 256(6): 721.

[13] [13] SUN Ji-yong, HUANG Shang-lian, ZHANG Jie, et al. Applied Optics,

          2008, 47(15)： 1364.

[17] [17] Oppenheinm Alan V. Signals and system. Beijing: Tsinghua University