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Microelectronics, Volume. 51, Issue 4, 577(2021)

Study on High Temperature Characteristics of 28 nm Ultra-Thin-Body FD-SOI

ZHANG Haoyi1,2,3, ZENG Chuanbin1,2, LI Xiaojing1,2, GAO Linchun1,2, LUO Jiajun1,2, and HAN Zhengsheng1,2,3
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    ZHANG Haoyi, ZENG Chuanbin, LI Xiaojing, GAO Linchun, LUO Jiajun, HAN Zhengsheng. Study on High Temperature Characteristics of 28 nm Ultra-Thin-Body FD-SOI[J]. Microelectronics, 2021, 51(4): 577

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    Received: Oct. 30, 2020

    Accepted: --

    Published Online: Feb. 21, 2022

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.200502

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology