Microelectronics, Volume. 52, Issue 1, 33(2022)

Study on Compensation Method for Polysilicon Resistance Linearity

YANG Yang, LEI Langcheng, GAO Weiqi, HU Yongfei, LIU Honghong, and FU Dongbing
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    References(5)

    [1] [1] CHUANG H M, THEI K B, TSAI S F, et al. Temperature-dependent characteristics of polysilicon and diffused resistors [J]. IEEE Trans Elec Dev, 2003, 50(5): 1413-1415.

    [2] [2] RAMAN M S, BHATTACHARYA K E, BHAT K N. Physical model for the resistivity and temperature coefficient of resistivity in heavily doped polysilicon [J]. IEEE Trans Elec Dev, 2006, 53(8): 1885-1892.

    [3] [3] ZUMBAHLEN H. Basic linear design [Z]. Analog Devices, Inc., 2007: 10.15-10.20.

    [4] [4] SCHAFFT H A. Thermal analysis of electromigration test structures [J]. IEEE Trans Elec Dev, 1987, 34(3): 664-672.

    [5] [5] MITTL S, GUARIN F. Self-heating and its implications on hot carrier reliability evaluations [C] // IEEE Int Reliab Phys Symp. Monterey, CA, USA. 2015.

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    YANG Yang, LEI Langcheng, GAO Weiqi, HU Yongfei, LIU Honghong, FU Dongbing. Study on Compensation Method for Polysilicon Resistance Linearity[J]. Microelectronics, 2022, 52(1): 33

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    Paper Information

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    Received: Jul. 16, 2021

    Accepted: --

    Published Online: Jun. 14, 2022

    The Author Email:

    DOI:10.13911/j.cnki.1004-3365.210266

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