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Chinese Optics Letters, Volume. 8, Issue s1, 218(2010)

Study on fabrication process of micro-bridge structure arrays based on amorphous silicon films

Huan Liu1, Shanshan Wang2, Changlong Cai1, Shun Zhou1, and Weiguo Liu1
Author Affiliations
  • 1Micro-Optoelectrical System Laboratory, Xi'an Technological University, Xi'an 710032, China
  • 2Xi'an Technological University North Institute of Information Engineering, Xi'an 710025, China
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    [1] [1] D. A. Scribner, M. R. Kruer, and J. M. Killiany, in Proceedings of IEEE, 79, 66 (1991).

    [2] [2] P. W. Kruse and D. D. Skatrud, Uncooled Infrared Imaging Arrays and Systems, Semiconductors and Semimetals (Academic Press Limited, New York, 1997).

    [3] [3] P. W. Kruse, Uncooled Infrared Focal Plane Arrays, Proc. SPIE 2552, 556 (1995).

    [4] [4] J. Kreider, P. Houard, C. Li, and T. Fitzgibbons, Laser Focus World 33, 139 (1997).

    [5] [5] S. Horn, D. Lohrmanm J. Campbell, P. Perconti, and R. Balcerack, Proc. SPIE, 4369, 210 (2001).

    [6] [6] M. H. Unewisse, B. I. Craig, R. J. Watson, O. Renhold, and K. C. Liddiard, Proc. SPIE 2554, 43 (1995).

    [7] [7] K. C. Liddiard, Proc. SPIE 2746, 72 (1996).

    Cited By

    [1] Huan Liu, Wei Guo Liu, Chang Long Cai, Shun Zhou. A Novel Method for the Fabrication of Infrared Focal Plane Arrays Based on the Amorphous Silicon. Materials Science Forum, 663-665, 1183(2010).

    [2] Huan Liu, Liang Song, Shun Zhou, Chang Long Cai. Thin Metal Films and Multi-Layers Structure as Absorbers for Infrared Detectors. Materials Science Forum, 663-665, 352(2010).

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    Huan Liu, Shanshan Wang, Changlong Cai, Shun Zhou, Weiguo Liu, "Study on fabrication process of micro-bridge structure arrays based on amorphous silicon films," Chin. Opt. Lett. 8, 218 (2010)

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    Paper Information

    Received: Dec. 14, 2009

    Accepted: --

    Published Online: May. 14, 2010

    The Author Email:

    DOI:10.3788/COL201008s1.0218

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology