[1] [1] K. Kakizaki, Y. Sasaki, and T. Inoue, Rev. Sci. Instrum. 77, 035109 (2006).

[2] [2] D. Basting and G. Marowsky, Excimer Laser Technology (Springer, Berlin, 2005).

[3] [3] T. Ito and S. Okazaki, Nature 406, 1027 (2000).

[4] [4] G. Grunefeld, H. Schluter, P. Andresen, and E.W. Rothe, Appl. Phys. B 62, 241 (1996).

[5] [5] R. J. Balla and G. C. Herring, Rev. Sci. Instrum. 71, 2246 (2000).

[6] [6] Q. Lou, T. Yagi, and H. Saito, J. Appl. Phys. 67, 6591 (1990).

[7] [7] Y. Ran, Y. Tan, L. Sun, S. Gao, J. Li, L. Jin, and B. Guan, Opt. Express 19, 18577 (2011).

[8] [8] A. Othonos and X. Lee, Rev. Sci. Instrum. 66, 3112 (1995).

[9] [9] Y. Yu, L. You, X. Liang, and X. Fang, Chin. J. Lasers (in Chinese) 37, 2253 (2010).

[10] [10] Q. Lou, J. Xu, S. Fu, D. Zhuang, and J. Chen, Gas Laser with Pulsed Discharge (Science Press, Beijing, 1993).

[11] [11] T. J. Mckee, Can. J. Phys. 63, 214 (1985).

[12] [12] R. M. Hofstra, F. A. van Goor, and W. J. Witteman, J. Opt. Soc. Am. B 16, 1068 (1999).

[13] [13] T. J. Pacala, I. S. McDermid, and J. B. Laudenslager, Appl. Phys. Lett. 44, 658 (1984).

[14] [14] J. P. Partanen and M. J. Shaw, Appl. Phys. B 43, 231 (1987).

[15] [15] R. Fedosejevs, I. V. Tomov, D. C. D. McKen, M. Arnfield, C. Domier, and A. A. Offenberger, J. Appl. Phys. 54, 5629 (1983).

[16] [16] J. Goldhar and J. R. Murray, Opt. Lett. 1, 199 (1977).

[17] [17] D. C. D. McKen, R. Fedosejevs, M. Arnfield, I. V. Tomov, C. Domier, and A. A. Offenberger, Rev. Sci. Instrum. 54, 845 (1983).

[18] [18] H. F. Dobele and B. Ruckle, Appl. Opt. 23, 1040 (1984).

[19] [19] T. R. Loree, K. B. Butterfield, and D. L. Barker, Appl. Phys. Lett. 32, 171 (1978).

[20] [20] R. S. Hargrove and J. A. Paisner, in Proceedings of Dig. Top. Meeting Excimer Lasers Lasers and Electro-Optics ThA61 (1979).

[21] [21] T. Ariga and K. Hotta, Jpn. J. Appl. Phys. 43, 5279 (2004).

[22] [22] R. J. Balla and R. Hart, Rev. Sci. Instrum. 69, 2591 (1998).

[23] [23] B. H. Kleemann, Opt. Lett. 37, 1002 (2012).

[24] [24] V. Fleurov, S. Rokitski, R. Bergstedt, H. Ye, K. O'Brien, R. Jacques, F. Trintchouk, E. Figueroa, T. Cacouris, and D. Brown, Proc. SPIE 6924, 69241R (2008).

[25] [25] M. Yoshino, H. Umeda, H. Tsushima, H. Watanabe, S. Tanaka, S. Matsumoto, T. Onose, H. Nogawa, Y. Kawasuji, T. Matsunaga, J. Fujimoto, and H. Mizoguchi, Proc. SPIE 7640, 76402A (2010).

[26] [26] R. Rokitski, T. Ishihara, R. Rao, R. Jiang, M. Haviland, T. Cacouris, and D. Brown, Proc. SPIE 7640, 76401Q (2010).

[27] [27] H. Tsushima, M. Yoshino, T. Ohta, T. Kumazaki, H. Watanabe, S. Matsumoto, H. Nakarai, H. Umeda, Y. Kawasuji, T. Suzuki, SatoshiTanaka, A. Kurosu, T. Matsunaga, J. Fujimoto, and H. Mizoguchi, Proc. SPIE 7274, 72743L (2009).

[28] [28] E. Loewen, D. Maystre, E. Popov, and L. Tsonev, Appl. Opt. 35, 1700 (1996).

[29] [29] R. Trebino, Appl. Opt. 24, 1130 (1985).

[30] [30] F. J. Duarte, Appl. Opt. 31, 6979 (1992).

[31] [31] F. J. Duarte, Appl. Opt. 40, 3038 (2001).

[32] [32] J. Goldhar, W. R. Rapoport, and J. R. Murray, IEEE J. Quantum Electon. 16, 235 (1980).

[33] [33] T. Ishihara, H. Besaucele, C. Maley, V. Fleurov, P. O'Keeffe, M. Haviland, R. Morton, W. Gillespie, T. Dyer, B. Moosman, and R. Poole, Proc. SPIE 5377, 1858 (2004).

[34] [34] V. B. Fleurov, D. J. Colon III, D. J. W. Brown, P. O'Keeffe, H. Besaucele, A. I. Ershov, F. Trintchouk, T. Ishihara, P. Zambon, and R. Rafac, Proc. SPIE 5040, 1694 (2003).

[35] [35] R. G. Caro, M. C. Gower, and C. E. Webb, J. Phys. D 15, 767 (1982).