Theoretical simulation and experiments based on a prism beam expander and an echelle grating are conducted to study the dependence of linewidth and pulse energy on incidence angle and slit width. With a larger prism incident angle or narrower slit width, the linewidth becomes narrower while the laser pulse energy becomes lower. However, the pulse energy can be improved by optimally designing the prism beam expander. In addition, a subpicometer linewidth ArF laser is obtained with a double-prism beam expander and an echelle grating.