Fig. 1. Fabrication process of silicon waveguide

Fig. 2. Model of the H-T splitter/combiner

Fig. 3. Simulated results of the H-T splitter/combiner

Fig. 4. Model of the 3 dB coupler

Fig. 5. Simulated results of the 3 dB coupler

Fig. 6. Model of the 4-way splitter/combiner

Fig. 7. Sectional view of the 4-way splitter/combiner

Fig. 8. Simulated results of the 4-way splitter/combiner

Fig. 9. Photographs of the fabricated 4-way splitter/combiner and the test fixture

Fig. 10. microscope view of waveguide port

Fig. 11. The insertion and return losses of the silicon splitter /combiner

Fig. 12. The typical tested result of W band GaN MMIC

Fig. 13. The structure of the silicon combined module

Fig. 14. The silicon combined PA module

Fig. 15. The test platform of the silicon combined PA module

Fig. 16. The measured output power, PAE and combining efficiency