Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding

Lu Zhang; Wendong Zhang; Shougang Zhang; Shubin Yan

doi:10.3788/COL201917.100201

Chinese Optics Letters, Volume. 17, Issue 10, 100201(2019)

Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding

Lu Zhang¹, Wendong Zhang¹, Shougang Zhang², and Shubin Yan^1、*

Author Affiliations

¹Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China

²Key Laboratory of Time and Frequency Primary Standards, National Time Service Center, Chinese Academy of Sciences, Xi’an 710600, China

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Lu Zhang, Wendong Zhang, Shougang Zhang, Shubin Yan, "Micro-fabrication and hermeticity measurement of alkali-atom vapor cells based on anodic bonding," Chin. Opt. Lett. 17, 100201 (2019)

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Paper Information

Category: Atomic and Molecular Physics

Received: May. 17, 2019

Accepted: Jul. 26, 2019

Posted: Jul. 26, 2019

Published Online: Aug. 29, 2019

The Author Email: Shubin Yan (shubin_yan@nuc.edu.cn)

DOI:10.3788/COL201917.100201

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology