[1] [1] A Y Liu, M L Cohen. Prediction of new low compressibility solids[J]. Science, 1989, 245(4920):841-842.

[2] [2] Y Aoi, K Ono, K Sakurada, et al.. Effects of heat treatment on structure of amorphous CNx thin films by pulsed laser deposition[J]. Thin Solid Films, 2001, 389(1-2): 62-67.

[3] [3] Y H Cheng, Z H Sun, B K Tay, et al.. Influence of deposition pressure on the composition and structure of carbon nitride films deposited by direct current plasma assisted pulsed laser ablation[J]. Applied Surface Science, 2001, 182(1-2): 32-39.

[4] [4] Zheng Jinxiang, Zheng Xiaohua, Shen Tao, et al.. Microstructure and triobological behavior of CNx films deposited by iterative pulsed laser deposition[J]. Chinese J Lasers, 2012, 39(6): 0607001.

[5] [5] E Cappellia, S Orlandob, D M Trucchia, et al.. Carbon nitride films by RF plasma assisted PLD: spectroscopic and electronic analysis[J]. Applied Surface Science, 2011, 257(12): 5175-5180.

[6] [6] Guo Jian, Yang Yimin. Influence of DC biasing on amorphous carbon deposited by pulse laser ablation[J]. Journal of Optoelectronics·Laser, 2002, 13(10): 1044-1047.

[7] [7] Xiao Xingcheng, Jiang Weihui, Tian Jingfen, et al.. Effect of high-temperature treatment on the crystallization of CNx thin films[J]. Acta Physica Sinica, 2000, 49(1): 173-176.

[8] [8] X F Xu, N Xu, W Hu, et al.. Self-assembled growth of carbon nitride nanocones using abnormal glow discharge[J]. Applied Physics A-Materials Science and Processing, 2009, 96(2): 415-421.

[9] [9] Zhang Lianzhu. Creation rates of active species (N+, N) in a nitrogen direct current glow discharge[J]. Nuclear Fusion and Plasma Physics, 2003, 23(2): 113-118.

[10] [10] Y H Cheng, X L Qiao, J G Chen, et al.. Synthesis of carbon nitride films by direct current plasma assisted pulsed laser deposition[J]. Applied Physics A-Materials Science and Processing, 2002, 74(2): 225-231.

[11] [11] K Kutasi, Z Donko, M Mohai, et al.. Formation of CNx layers in a nitrogen glow discharge with graphite electrodes[J]. Vacuum, 2002, 68(4): 311-319.

[12] [12] M Aono, S Aizawa, N Kitazawa, et al.. XPS study of carbon nitride films deposited by hot filament chemical vapor deposition suing carbon filament[J]. Thin Solid Films, 2008, 516(5): 648-651.

[13] [13] J T Titantah, D Lamoen. Carbon and nitrogen 1s energy levels in amorphous carbon nitride systems: XPS interpretation using first-principles[J]. Diamond and Relater Materials, 2007, 16(3): 581-588.

[14] [14] Zheng Xiaohua, Tu Jiangping, Song Renguo. Microstructure and tribological behavior of pulsed laser deposited a-CNx films[J]. Applied Surface Science, 2010, 256(10): 3211-3215.

[15] [15] Stephen Muhl, Juan Manuel Méndez. A review of the preparation of carbon nitride films[J]. Diamond and Related Materials, 1999, 8(10): 1809-1830.

[16] [16] Luo Le, Zhang Junfang, Fang Xiaodong, et al.. Influence of the laser pulsed energy upon the diamond-like carbon film and its infrared property[J]. Chinese J Lasers, 2010, 37(12): 3121-3126.

[17] [17] Tan Manlin, Zhu Jiaqi, Han Jiecai, et al.. Raman characterization of boron doped tetrahedral amorphous carbon films[J]. Materials Research Bulletin, 2008, 43(2): 453-462.

[18] [18] Bai Ting, Ye Jingfeng, Liu Jingru, et al.. Pulsed excimer laser deposited diamond like carbon film on ZnS with wide-spectral transmission[J]. Chinese J Lasers, 2007, 34 (7): 992-997.

[19] [19] Li Junjie, Cao Peijiang, Zheng Weitao, et al.. Influence of bombarding ions energy on the content of sp3C—N bonds in carbon nitride films[J]. Chemical Journal of Chinese Universities, 2003, 5(24): 880-883.

[20] [20] Li Tiejun, Liu Jingru, Wang Lige. Pulsed laser deposition of diamond like carbon film with XeCl (308 nm) laser[J]. Acta Optica Sinica, 1997, 17(3): 331-337.

[21] [21] Chen Jiangbo, Wang Li, Su Xueqiong, et al.. Affect of ZnO thin film of pulsed laser deposition by substrate temperatures[J]. Chinese J Lasers, 2009, 36(6): 1539-1544.

[22] [22] Luo Le, Zhao Shumi, Qiu Jihong, et al.. Influence of the substrate temperature upon the diamond-like carbon films deposited by pulsed laser[J]. Chinese J Lasers, 2010, 37(8): 2063-2067.

[23] [23] T Tokoroyama, M Goto, N Umehara, et al.. Effect of nitrogen atoms desorption on the friction of the CNx coating against Si3N4 ball in nitrogen gas[J]. Tribology Letters, 2006, 22(3): 215-220.