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Chinese Journal of Lasers, Volume. 51, Issue 7, 0701013(2024)

High‑Repetition‑Rate Continuously Tunable Ultra‑Short Pulse Laser Across Range from 192 nm to 300 nm

Huagang Liu, Kaiming Ruan, Jinhui Li, Fei Shi, Jianhong Huang, and Wenxiong Lin*
Author Affiliations
  • Key Laboratory of Optoelectronic Materials Chemistry and Physics, Fujian Institute of Research on the Structure of Matter, Chinese Academy of Sciences, Fuzhou 350002, Fujian , China
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    Schematic of 192‒300 nm continuously tunable deep ultraviolet/ultraviolet laser

    Fig. 1. Schematic of 192‒300 nm continuously tunable deep ultraviolet/ultraviolet laser

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    Frequency conversion power and conversion efficiency of laser at each stage. (a) Fundamental laser; (b) second harmonic generation (375‒500 nm); (c) direct forth harmonic generation (210‒250 nm); (d) third harmonic generation from sum frequency(250‒300 nm); (e) forth harmonic generation from sum frequency(192‒210 nm)

    Fig. 2. Frequency conversion power and conversion efficiency of laser at each stage. (a) Fundamental laser; (b) second harmonic generation (375‒500 nm); (c) direct forth harmonic generation (210‒250 nm); (d) third harmonic generation from sum frequency(250‒300 nm); (e) forth harmonic generation from sum frequency(192‒210 nm)

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    Schematic of compensation of spatial walk-off

    Fig. 3. Schematic of compensation of spatial walk-off

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    Output spectra of continuously tunable deep ultraviolet/ultraviolet laser covering 192‒300 nm band

    Fig. 4. Output spectra of continuously tunable deep ultraviolet/ultraviolet laser covering 192‒300 nm band

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    Cross-correlation curve of third harmonic with wavelength of 266.7 nm

    Fig. 5. Cross-correlation curve of third harmonic with wavelength of 266.7 nm

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    Long term monitoring of beam pointing stability

    Fig. 6. Long term monitoring of beam pointing stability

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    • Table 1. Crystal parameters for SHG and SFG

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      Table 1. Crystal parameters for SHG and SFG

      Wavelength rangeModule No.Frequency conversionCrystal and type of phase matching

      Size /

      （mm×mm×mm）

      		Crystal angle /（°）
      210‒250 nmModule 1SHG：ω0+ω0→2ω0BBSAG， Type Ⅰ5.5×5.5×126.3
      FHG：2ω0+2ω0→4ω0BBSAG， Type Ⅰ5.5×5.5×167.55
      250‒300 nmModule 2SHG：ω0+ω0→2ω0BBSAG， Type Ⅰ5.5×5.5×129.2
      THG：2ω0+ω0→3ω0BBSAG， Type Ⅰ5.5×5.5×144.4
      192‒210 nmModule 3FHG：3ω0+ω0→4ω0BBSAG， Type Ⅰ5.5×5.5×164.8
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    Huagang Liu, Kaiming Ruan, Jinhui Li, Fei Shi, Jianhong Huang, Wenxiong Lin. High‑Repetition‑Rate Continuously Tunable Ultra‑Short Pulse Laser Across Range from 192 nm to 300 nm[J]. Chinese Journal of Lasers, 2024, 51(7): 0701013

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    Paper Information

    Category: laser devices and laser physics

    Received: Dec. 13, 2023

    Accepted: Feb. 7, 2024

    Published Online: Mar. 29, 2024

    The Author Email: Lin Wenxiong (wxlin@fjirsm.ac.cn)

    DOI:10.3788/CJL231524

    CSTR:32183.14.CJL231524

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology