Method for low-temperature displacement measurement of complex opto-mechanical structure based on symmetrical laser displacement sensors

Xiao TANG; Baoyu YANG; Yinong WU; Chengdong SHAN; Jie LI; Yuhan LI

doi:10.3788/IRLA20240477

Infrared and Laser Engineering, Volume. 54, Issue 5, 20240477(2025)

Method for low-temperature displacement measurement of complex opto-mechanical structure based on symmetrical laser displacement sensors

Xiao TANG^1,2, Baoyu YANG^1,2, Yinong WU^1,2, Chengdong SHAN¹, Jie LI¹, and Yuhan LI^1,2

Author Affiliations

¹Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China

²University of Chinese Academy of Sciences, Beijing 100049, China

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Fig. 1. Diagram of W shape radiant cooler

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Fig. 2. Diagram of (a) system of measuring low temperature displacement (b) laser triangulation displacement sensor^[9] (c) laser displacement sensor position and the coordinate system in the low temperature displacement measurement

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Fig. 3. Photos of measuring system: (a) Mounting plates, sensors and multilayer insulation(MLI); (b) Radiant cooler and measuring system in the vacuum chamber

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Fig. 4. Diagram of test results and (a) system error 1), (b) system error 2), and (c) system error 3)

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Table 1. The normal condition and low-temperature condition of the radiant cooler
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Table 1. The normal condition and low-temperature condition of the radiant cooler
Temperature/K Housing & earthshield 1^st stage 2^nd stage
Normal condition 293 293 293
Low-temperature condition 220 130 97

Table 2. Result of low-temperature displacement measurement in MWIR optical path of the radiant cooler (Unit: μm)

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Table 2. Result of low-temperature displacement measurement in MWIR optical path of the radiant cooler (Unit: μm)

		X direction		Y direction
		+	−	Y direction
Change of sensor values	Detector	195±5	130±7	107±15
Change of sensor values	Lens set	108±6	116±5	154±10
Low-temperature displacement	One direction	87±12	14±11	−47±24
Low-temperature displacement	Average	51±11		−47±24
Calculated low-temperature displacement		53		−60
Relative error	One direction	64%	73%	22%
Relative error	Average	3.8%		22%

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Xiao TANG, Baoyu YANG, Yinong WU, Chengdong SHAN, Jie LI, Yuhan LI. Method for low-temperature displacement measurement of complex opto-mechanical structure based on symmetrical laser displacement sensors[J]. Infrared and Laser Engineering, 2025, 54(5): 20240477

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Paper Information

Category: 光电测量

Received: Jan. 11, 2025

Accepted: --

Published Online: May. 26, 2025

The Author Email:

DOI:10.3788/IRLA20240477

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology

Table 1. The normal condition and low-temperature condition of the radiant cooler

Table 1. The normal condition and low-temperature condition of the radiant cooler

Table 2. Result of low-temperature displacement measurement in MWIR optical path of the radiant cooler (Unit: μm)

Table 2. Result of low-temperature displacement measurement in MWIR optical path of the radiant cooler (Unit: μm)