Microelectronics, Volume. 51, Issue 2, 276(2021)
Manufacture and Teste of MEMS Grating Gyroscope
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HAO Feifan, LI Mengwei, WANG Junqiang, JIN Li. Manufacture and Teste of MEMS Grating Gyroscope[J]. Microelectronics, 2021, 51(2): 276
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Received: Aug. 8, 2020
Accepted: --
Published Online: Mar. 11, 2022
The Author Email: Feifan HAO (18334788380@163.com)
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