[1] [1] Lee S, Jeong Y C, Park J K. Facile fabrication of close-packed microlens arrays using photoinduced surface relief structures as templates[J]. Optics Express, 2007, 15(22): 14550-14559.

[2] [2] Wu M C, O Solgaard, Ford J E. Optical MEMS for lightwave communication[J]. Journal of Lightwave Technology, 2006, 24(12): 4433-4454.

[3] [3] Yang Luxia, Mao Jing, Wang Chunshui, et al.. Design and fabrication of microlens array with primary optical axis parallel to the substrate[J]. Journal of Optoelectronics·Laser, 2014, 25(5): 864-869.

[4] [4] Liu Jianlin, Zhang Binzhen, Cui Min, et al.. Design and fabrication of the micro lens arrays based on SU-8[J]. Micronanoelectronic Technology, 2012, 49(3): 187-191.

[5] [5] Liu Yongming. Optimechanical analysis and optimization of precision lens[D]. Beijing: University of Chinese Academy of Sciences, 2014.

[6] [6] Zhu Xiaoyang, Hou Liya, Zheng Yue, et al.. Fabrication of polymer micro-lens array by micro-fluid digitalization[J]. Optics and Precision Engineering, 2014, 22(2): 360-368.

[7] [7] Li Tonghai. The research to polymer microlens and arrays[D]. The Graduate School of the Chinese Academy of Sciences (XI′an Institute of Optics and Precision Mechanics of Chinese Academy of Sciences), 2006.

[8] [8] Zhong Kejun, Gao Yiqing, Li Feng, et al.. A method of fabricating concave polydimethylsiloxane microlens array[J]. Chinese J Lasers[J]. 2014, 41(3): 0310002.

[9] [9] Hong Shuijin, Chang Honglong, Xun Wenpeng, et al.. A fabrication method for micro-lenses based on the PDMS membrane[J]. Micronanoelectronic Technology, 2014, 51(4): 257-261.

[10] [10] Zhang Yong, Zhang Binzhen, Wu Shujuan, et al.. Fabrication and measurement of microlens arrays with primary optical axis paralleled to wafers[J]. Micronanoelectronic Technology, 2013, 50(1): 47-51.

[11] [11] Chung C K, Hong Y Z. Fabrication and analysis of the reflowed microlens arrays using JSR THB-130N photoresist with different heat treatments[J]. Microsystem Technnologies, 2007, 13(5): 523-530.

[12] [12] King C R, Lin L Y, Wu M C. Out-of-plane refractive microlens fabricated by surface micromachining[J]. IEEE Photonics Technology Letters, 1996, 8(10): 1349-1351.

[13] [13] Wu M C. Micromachining for optical and optoelectronic systems[J]. Proceedings of the IEEE, 1997, 85(11): 1833-1856.

[14] [14] Wu M C, Lin L Y, Lee S S, et al.. Free-space integrated optics realized by surface-micromachining[J]. International Journal of High Speed Electronics and Systems, 1997, 8(2): 51-65.

[15] [15] Zhao Wuxiang, Wang Qionghua, Li Lei. Tunable cylindrical liquid lens array for 2D/3D switchable display[J]. Acta Optica Sinica, 2015, 35(8): 0823001.

[16] [16] Li Xianghong, Liu Jun, Zhang Binzhen, et al.. Fabrication of NOA73 curved microlens arrays[J]. Journal of Optoelectronics·Laser, 2013, 24(2): 292-296.

[17] [17] Li Feng, Gao Yiqing, Xu Guangtao, et al.. Effectiveness analysis of transfer by using of PDMS for fabricating MLA with soft lithograph technique[J]. Journal of Nanchang Hangkong University (Natural Sciences), 2014, 28(3): 71-77.

[18] [18] Zhang Xu, Li Chen. Calibration and imaging model of light field camera with microlens array[J]. Acta Optica Sinica, 2014, 34(12): 1211005.

[19] [19] Shao Ping, Xia Lan, Zhao Dongfeng, et al.. Measurement and debugging of wedge-shaped lens in high power laser facility[J]. Chinese J Lasers, 2015, 42(4): 0408006.