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Laser & Optoelectronics Progress, Volume. 51, Issue 1, 11402(2014)

Electrodes System Design and Electric Field Simulation Research of ArF Excimer Laser

Chen Jinxin1,2、*, Xu Xiangyu1, and Wang Yu1
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    Chen Jinxin, Xu Xiangyu, Wang Yu. Electrodes System Design and Electric Field Simulation Research of ArF Excimer Laser[J]. Laser & Optoelectronics Progress, 2014, 51(1): 11402

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    Paper Information

    Category: Lasers and Laser Optics

    Received: Aug. 1, 2013

    Accepted: --

    Published Online: Dec. 26, 2013

    The Author Email: Jinxin Chen (ashion@aoe.ac.cn)

    DOI:10.3788/lop51.011402

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology