Chinese Journal of Lasers, Volume. 48, Issue 8, 0802021(2021)
Research Progress on Electrical/Mechanical Properties of Interconnection Structures Based on Nanowelding
Fig. 4. Ag-Ag local plasma welding induced by continuous laser[56]. (a)-(d) In-situ welding of Ag nanowire gaps; (e) electrical properties of Ag nanowires before and after cutting and after nanoheating; (f) electrical properties of lap Ag nanowire before and after nanosoldering
Fig. 5. Nano interconnection of heterogeneous metals. (a) Three-dimensional arch bridge structure with continous laser-induced connection of Ag nanowires and Au electrodes and its electrical/ mechanical properties[57]; (b) ultrathin Ag-Au nanowires cold welding[7]; (c) cold welding of ultra-thin Cu-Al nanowires[58]
Fig. 6. Laser-induced nanowelding between ZnO and Ag nanowires[59]. (a) Schematic; (b) morphology of single welded junction; (c) temperature distribution of nanowire; (d) welding image of ZnO and Au electrodes; (e) I-V (current-voltage) curves before and after welding; (f) semilog plot of current-voltage characteristic curve
Fig. 7. Laser-induced nanowelding between metal electrodes and semiconductor nanomaterials. (a)-(d) Femtosecond laser-induced Au/SiO2/SiC heterogeneous nanojoint and electrical characteristics of three-terminal devices[61]; (e)(f) laser-induced heterogeneous nanojoint between metal electrodes and graphene and its photoelectric performance[63]
Fig. 8. Electrical/mechanical properties of flexible interconnected thin films welded by laser plasma[71]. (a) Fatigue resistance test of Cu nanowires; (b) laser induced long Ag nanowires interconnection and its electrical/mechanical performance testing
Fig. 10. Electrical/mechanical performance of thin films based on interconnection networks of carbon-based nanomaterials. (a)(b) Laser-induced nanowelding between CNTs and flexible substrate and mechanics properties testing[79]; (c) laser-induced carbon nanotubes interconnect with metal electrodes[64]; (d) laser-induced carbon nanotubes interconnection network[81]
Fig. 11. Electrical/mechanical performance of semiconductor interconnect structures. (a) Femtosecond laser-induced nanowelding between ZnO nanowires and its photoelectrical response[23]; (b) laser-induced interconnection of ZnO and GaN thin films and electroluminescence enhancement of the device after interconnection[84]
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Xiaoying Ren, Jianlei Cui, Yang Lu, Xuesong Mei. Research Progress on Electrical/Mechanical Properties of Interconnection Structures Based on Nanowelding[J]. Chinese Journal of Lasers, 2021, 48(8): 0802021
Category: laser manufacturing
Received: Nov. 30, 2020
Accepted: Feb. 18, 2021
Published Online: Apr. 16, 2021
The Author Email: Cui Jianlei (cjlxjtu@mail.xjtu.edu.cn)