Acta Optica Sinica, Volume. 44, Issue 17, 1732011(2024)

Development of Femtosecond Laser Two-Photon Polymerization Technology and Its Application in Fabrication of Functional Micro/Nano Devices (Invited)

Xiaoxu Rao, Runmin Zhang, Hao Wu*, and Dong Wu**
Author Affiliations
  • Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, Anhui , China
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    Figures & Tables(9)
    Schematic diagram of single-photon absorption and two-photon absorption of femtosecond laser[31-32]
    Schematic diagram of femtosecond laser two-photon polymerization processing system. (a) Single-focus processing[36]; (b) multi-focus processing[38]; (c) incorporation of spatial light modulator for optical field modulation[40]; (d) processing system based on spatial and temporal focusing[52]
    Femtosecond laser two-photon polymerization for micro-nano robot processing with different driving mechanisms. (a) Ultrasonic drive[69]; (b) magnetic drive[79]; (c) thermal drive[84]
    Two types of micro robots with different driving mechanisms. (a) Magnetic driven micro spiral robots can easily adjust parameters such as height, radius, pitch, and cone angle[56]; (b) photothermal driven humanoid robot with joints composed of hydrogel with a gradient change in crosslinking density and deposited silver nanoparticles[57]
    Micro-lens fabricated by femtosecond laser technology. (a) Achromatic meta-lens based on holographic diffraction in visible light spectrum[59]; (b) refractive index gradient change lens for aberration-free focusing of infrared light[96]
    Applications of femtosecond laser processing in field of integrated optical micro-devices. (a) Adiabatic twist of waveguides for polarization encoding[60]; (b) fiber endface lens with ultra-high numerical aperture[92]; (c) miniature biomimetic compound eye integrated with CMOS camera[61]
    Fabrication of chiral micro-nano structures. (a), (b) Solely based on femtosecond laser direct writing[99-100]; (c), (d) combination of femtosecond laser direct writing and surface metal deposition[101-102]; (e), (f) combination of femtosecond laser direct writing and electrochemical deposition[103-104]
    Helical dichroism response of different chiral structures and its applications. (a) Response of planar chiral micro structures to left-handed/right-handed vortex light[62]; (b) flexible modulation of helical dichroism spectra using rotating stacked planar chiral structures[63]; (c) response of three-dimensional spiral structures to left-handed/right-handed vortex light[64]; (d) applications of chiral spiral arrays in information display, hiding, and encryption[65]
    Applications of femtosecond laser processing in field of biomedicine. (a) Microtube arrays with variable cross-sections fabricated by femtosecond laser processing for regulating yeast cell growth[66]; (b) porous microtube arrays can accelerate growth and directional connection of neurons[67]; (c) magnetically controlled robots for noninvasive puncture therapy of cells[68]; (d) capillary networks fabricated by femtosecond laser dynamic holography[16]
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    Xiaoxu Rao, Runmin Zhang, Hao Wu, Dong Wu. Development of Femtosecond Laser Two-Photon Polymerization Technology and Its Application in Fabrication of Functional Micro/Nano Devices (Invited)[J]. Acta Optica Sinica, 2024, 44(17): 1732011

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    Paper Information

    Category: Ultrafast Optics

    Received: Apr. 26, 2024

    Accepted: Jun. 4, 2024

    Published Online: Aug. 30, 2024

    The Author Email: Hao Wu (walech@ustc.edu.cn), Dong Wu (dongwu@ustc.edu.cn)

    DOI:10.3788/AOS240921

    CSTR:32393.14.AOS240921

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