Acta Optica Sinica, Volume. 31, Issue 12, 1222003(2011)
Study on Characteristics of Aberrations for an Active Liquid Lens in Lithographic Objective Lens
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Yuan Wenquan, Gong Yan. Study on Characteristics of Aberrations for an Active Liquid Lens in Lithographic Objective Lens[J]. Acta Optica Sinica, 2011, 31(12): 1222003
Paper Information
Category: Optical Design and Fabrication
Received: Jun. 13, 2011
Accepted: --
Published Online: Nov. 28, 2011
The Author Email: Wenquan Yuan (yuanwenquan@tom.com)
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